Acta Optica Sinica, Volume. 26, Issue 12, 1892(2006)
Effect of Energy Monochromaticity and Interfacial Roughness on Multilayer Reflectivity
[1] [1] H. J. Voorma, E. Louis, N. B. Koster et al.. Characterization of multilayers by Fourier analysis of X-ray reflectivity[J]. J. Appl. Phys., 1997, 81(9): 6112~6119
[2] [2] D. E. Savage, J. Kleiner, N. Schimke et al.. Determination of roughness correlation in multilayer films for X-ray mirrors[J]. J. Appl. Phys., 1991, 69(3): 1411~1424
[3] [3] Eberhard Spiller, Alan E. Rosenbluth. Determination of thickness errors and boundary roughness from the measured performance of a multilayer coating[J]. Opt. Engng., 1986, 25(8): 954~963
[5] [5] S. M. Feng, X. M. Dou. Effect of the energy resolution on the reflectance of multilayer[J]. Phys. Lett. A, 2003, 309: 477~481
[6] [6] Feng Shimeng, Zhao Haiying, Huang Meizhen et al.. The correlation of the energy resolution of incidence light with measured reflectance of multilayers[J]. Science in China (G), 2003, 33(3): 257~264
Get Citation
Copy Citation Text
[in Chinese]. Effect of Energy Monochromaticity and Interfacial Roughness on Multilayer Reflectivity[J]. Acta Optica Sinica, 2006, 26(12): 1892