Fig. 1. Working principle of the chromatic confocal displacement sensor

Fig. 2. Effect of different slopes and image space numerical apertures on full width at half maximum (FWHM). (a) k=400; (b) k=600; (c) k=800; (d) k=1000

Fig. 3. Inversed telephoto structure

Fig. 4. Relationship between the shortening ratio Γ and r, θ'

Fig. 5. Chromatic dispersion lens

Fig. 6. Spot diagrams

Fig. 7. Linear fitting curve of wavelength and focal shift

Fig. 8. Interference detection experimental device

Fig. 9. Detection result of the ZYGO interferometer

Fig. 10. Calibration experiment. (a) Physical diagram; (b) schematic diagram

Fig. 11. Detection error

Fig. 12. Axial resolution test

Fig. 13. Maximum measuring angle test setup

Fig. 14. Maximum measuring angle test result