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Piezoelectrics & Acoustooptics, Volume. 46, Issue 1, 118(2024)

Design and Research of a Beam-Composite Membrane-Island Pressure Resistance Pressure Sensor

JIANG Hao1,2, HUANG Jing1,2,3, YUAN Yupeng1,2,3, LI Chunyang1,2, MIAO Jinwei1,2, and LI Guangxian1,2
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    JIANG Hao, HUANG Jing, YUAN Yupeng, LI Chunyang, MIAO Jinwei, LI Guangxian. Design and Research of a Beam-Composite Membrane-Island Pressure Resistance Pressure Sensor[J]. Piezoelectrics & Acoustooptics, 2024, 46(1): 118

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    Paper Information

    Received: Nov. 6, 2023

    Accepted: --

    Published Online: Jul. 18, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.01.022

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology