Infrared and Laser Engineering, Volume. 50, Issue 12, 20210624(2021)
Study on measurement method of mirror reflection laser tracking interferometric length measurement
Figures & Tables(11)
Fig. 1. Model of laser tracking interferometric length measurement
Fig. 2. Principle of mirror reflection laser tracking interferometric length measurement
Table 1.
E n verification resultView tableView in ArticleTable 1.
E n verification resultInterferometric length measurement Coordinate measuring machine $ L/{\text{mm}} $ $ U/{\text{μm}} $ $ {L_{ { { {P} }_{\text{1} } }{ { {P} }_{\text{2} } } } }/{\text{mm} } $ $ {U_0}/{\text{μm}} $ En 1000.2833 1.1 1000.2825 2.6 0.3
Table 2. Angle adjustment verification result
View tableView in ArticleTable 2. Angle adjustment verification result
$ L/{\text{mm}} $ Adjustment strategy Angle $ \;\beta /({^ \circ } )$ $ \overline M $ $ \overline t /\min $ $ \Delta L/{\text{μm}} $ $ U/{\text{μm}} $ 1000 Rough adjustment 0.0421 1 4 9.2 11.7 This paper strategy 0.0096 9 10 1.2 3.0 Optimal state 0.0003 18 23 — 1.1 Rough adjustment 0.2746 1 5 7.6 8.1 2500 This paper strategy 0.0293 10 13 2.6 3.7 Optimal state 0.0005 21 28 — 3.1
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Shaodong Ping, Yunxia Fu, Feng Zhang, Yu Ren, Ming Kong. Study on measurement method of mirror reflection laser tracking interferometric length measurement[J]. Infrared and Laser Engineering, 2021, 50(12): 20210624
Paper Information
Category: Photoelectric measurement
Received: Aug. 30, 2021
Accepted: --
Published Online: Feb. 9, 2022
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