Study on the Influence of Inclined Hammer Structure on the Performance of SAW Resonator

LI Qiang; SHUAI Yao; WU Chuangui; LUO Wenbo; ZHANG Wanli

doi:10.11977/j.issn.1004-2474.2025.03.012

Piezoelectrics & Acoustooptics, Volume. 47, Issue 3, 484(2025)

Study on the Influence of Inclined Hammer Structure on the Performance of SAW Resonator

LI Qiang^1,2, SHUAI Yao^2,3, WU Chuangui^2,3, LUO Wenbo^2,3, and ZHANG Wanli^2,3

Author Affiliations

¹College of Optoelectronic Engineering，Chongqing University of Posts and Telecommunications，Chongqing 400065，China

²Chongqing

³Institute of Microelectronics Industry Technology，University of Electronics Science and Technology of China，Chongqing 401332，China

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LI Qiang, SHUAI Yao, WU Chuangui, LUO Wenbo, ZHANG Wanli. Study on the Influence of Inclined Hammer Structure on the Performance of SAW Resonator[J]. Piezoelectrics & Acoustooptics, 2025, 47(3): 484

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Paper Information

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Received: Jan. 3, 2025

Accepted: --

Published Online: Jul. 11, 2025

The Author Email:

DOI:10.11977/j.issn.1004-2474.2025.03.012

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology