Piezoelectrics & Acoustooptics, Volume. 47, Issue 3, 484(2025)

Study on the Influence of Inclined Hammer Structure on the Performance of SAW Resonator

LI Qiang1,2, SHUAI Yao2,3, WU Chuangui2,3, LUO Wenbo2,3, and ZHANG Wanli2,3
Author Affiliations
  • 1College of Optoelectronic Engineering,Chongqing University of Posts and Telecommunications,Chongqing 400065,China
  • 2Chongqing
  • 3Institute of Microelectronics Industry Technology,University of Electronics Science and Technology of China,Chongqing 401332,China
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    To enhance the performance of high-frequency filters used in the 5G era,a surface acoustic wave(SAW)resonator,based on the SMR structure,with X-37°Y LiNbO3 as the piezoelectric substrate was studied. The influence of resonator structure parameters on performance was investigated by two- and three-dimensional finite-element simulations,whose results were verified through wafer fabrication. The results show that the resonator performance is optimal when the rotation angle in this structure is 37°,and increasing the tilt angle can enhance the suppression effect on the lateral mode spurious. However,when the tilt angle exceeds 18°,the effect weakens,and new spurious is introduced. The tilted small hammer structure can improve the quality factor(Q)of the resonator to a certain extent for the tilted structure. These results underscore the tilted small hammer structure with a tilt angle of 15°-18° as the best solution. This structure can balance spurious suppression and Q-value maintenance,providing design guidance for high-frequency SAW filters.

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    LI Qiang, SHUAI Yao, WU Chuangui, LUO Wenbo, ZHANG Wanli. Study on the Influence of Inclined Hammer Structure on the Performance of SAW Resonator[J]. Piezoelectrics & Acoustooptics, 2025, 47(3): 484

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    Paper Information

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    Received: Jan. 3, 2025

    Accepted: --

    Published Online: Jul. 11, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.03.012

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