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Acta Optica Sinica, Volume. 41, Issue 3, 0313001(2021)

Extraction of Material Parameters by Transmission Spectra of AlGaN Film

Binbin Sheng1,2,3,4, Ling Wang1,2、*, Jintong Xu1,2, and Xiangyang Li1,2,3,4
Author Affiliations
  • 1State Key Laboratory of Transducer Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
  • 2Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
  • 3School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, China
  • 4University of Chinese Academy of Sciences, Beijing 100049, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (7)
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    References (26)
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    Figures & Tables(7)
    Structure plot of the samples and light propagation plot. (a) Structure plot; (b) light propagation plot

    Fig. 1. Structure plot of the samples and light propagation plot. (a) Structure plot; (b) light propagation plot

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    Measured transmission spectra of the samples

    Fig. 2. Measured transmission spectra of the samples

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    Fitted transmission spectra. (a) Sample 1; (b) sample 2

    Fig. 3. Fitted transmission spectra. (a) Sample 1; (b) sample 2

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    AFM images and horizontal section height profiles. (a)(b) Sample 1; (c)(d) sample 2

    Fig. 4. AFM images and horizontal section height profiles. (a)(b) Sample 1; (c)(d) sample 2

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    Fitted absorption coefficient from the films transfer matrix of samples 1 and 2

    Fig. 5. Fitted absorption coefficient from the films transfer matrix of samples 1 and 2

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    Fitted refractive index from transmission spectra of samples 1 and 2

    Fig. 6. Fitted refractive index from transmission spectra of samples 1 and 2

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    • Table 1. Fitted parameters of transmission spectra

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      Table 1. Fitted parameters of transmission spectra

      ParameterSample 1Sample 2
      α1 /cm-18901630000
      α2 /cm-1156550
      E0 /eV4.544.85
      E1 /eV2.632.00
      EpitaxialAl0.65Ga0.35NlayerEurbach /eV0.0850.029
      A2.052.05
      B /nm245232
      C /nm150188
      d1 /nm10372861
      BufferlayerA'1.92.0
      d2/nm18.2626
      σ /nm15.85.44
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    Binbin Sheng, Ling Wang, Jintong Xu, Xiangyang Li. Extraction of Material Parameters by Transmission Spectra of AlGaN Film[J]. Acta Optica Sinica, 2021, 41(3): 0313001

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    Paper Information

    Category: Integrated Optics

    Received: Jul. 10, 2020

    Accepted: Aug. 31, 2020

    Published Online: Feb. 28, 2021

    The Author Email: Wang Ling (wangling@mail.sitp.ac.cn)

    DOI:10.3788/AOS202141.0313001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology