Acta Optica Sinica, Volume. 41, Issue 3, 0313001(2021)
Extraction of Material Parameters by Transmission Spectra of AlGaN Film
To study the optical properties of multilayer AlGaN films with high Al content and calculate the relevant optical parameters, we fitted the transmission spectra of two samples based on the method of the multilayer-film transfer matrix. According to the mechanism of the AlGaN materials absorbing the incident light on different wavelengths, considering the out-of-band weak absorption of the materials, we established an absorption coefficient model in the all-band range (200--800 nm). At the same time, the root mean square (RMS) parameter of surface roughness was introduced to characterize the effect of the surface roughness of the materials on the transmission spectra. Furthermore, the transmission spectra of two Al0.65Ga0.35N samples with different structural parameters were fitted by the proposed model, and the fitting results were in good agreement with the experimental results. The absorption coefficient of Al0.65Ga0.35N material in the all-band range provided reliable experimental data for the study of the response spectra of solar-blind UV detectors. Additionally, the parameters such as film thickness, refractive index, and surface roughness of the Al0.65Ga0.35N materials were also obtained.
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Binbin Sheng, Ling Wang, Jintong Xu, Xiangyang Li. Extraction of Material Parameters by Transmission Spectra of AlGaN Film[J]. Acta Optica Sinica, 2021, 41(3): 0313001
Category: Integrated Optics
Received: Jul. 10, 2020
Accepted: Aug. 31, 2020
Published Online: Feb. 28, 2021
The Author Email: Wang Ling (wangling@mail.sitp.ac.cn)