High-performance compact vertical germanium photodiodes enabled by silicon corner reflectors

Wei Chen; Yang Shi; Yilun Wang; Mingjie Zou; Wen Zhang; Yu Yu; Xinliang Zhang

doi:10.1364/PRJ.532212

Photonics Research, Volume. 12, Issue 12, 2983(2024)

High-performance compact vertical germanium photodiodes enabled by silicon corner reflectors

Wei Chen¹, Yang Shi¹, Yilun Wang¹, Mingjie Zou¹, Wen Zhang², Yu Yu^1,3、*, and Xinliang Zhang^1,3,4,5

¹Wuhan National Laboratory for Optoelectronics & School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China

²Wuhan HG Genuine Optics Co., Ltd., Wuhan 430074, China

³Optics Valley Laboratory, Wuhan 430074, China

⁴Xidian University, Xi’an 710126, China

⁵e-mail: xlzhang@mail.hust.edu.cn

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Fig. 1. (a) Structural schematic of the waveguide SCR-assisted Ge PD. SiO2, silica; Si, silicon; Ge, germanium; Al, aluminum. (b) Side view of the PD; the inset shows the top view. (c) Simulated optical field distribution. (d) Simulated reflectivity of SCR at different wavelengths. (e) Comparison of light absorption by different lengths of Ge with and without SCR through simulation.

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Fig. 2. (a) Microscope image of the fabricated PD with SCR; the inset is the detailed view of Ge and SCR. (b) Curves of dark current and photocurrent of PDs varying with bias voltage. (c) Measured variation curves of photocurrents with different input optical powers at −1 V. (d) Measured responsivity of SCR-assisted PD at different wavelengths.

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Fig. 3. Measured S21 parameters for the PD with SCR.

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Fig. 4. Measured eye diagrams for 120, 130, 140 Gb/s OOK signals and 200, 220, 240 Gb/s PAM4 signals at −1 dBm.

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Table 1. Performance Comparison between Proposed PDs and Literature^a

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Table 1. Performance Comparison between Proposed PDs and Literature^a

Ref.	Type	$R$ (A/W)	$I_{d}$ (nA)	BW (GHz)	Ge area ( ${μm}^{2}$ )	DCD ( $mA / {cm}^{2}$ )	NEP ( $W / {Hz}^{1 / 2}$ )
[3]	Lateral	0.74	2.4	$> 67$	$14.2 \times 0.5$	33.80	$3.75 \times 10^{- 14}$
[12]	Lateral	0.45	$< 100$	240	$10 \times 0.15$	2500	$3.98 \times 10^{- 13}$
[12]	Lateral	0.30	$< 200$	265	$10 \times 0.1$	5000	$8.43 \times 10^{- 13}$
[19]	Vertical	0.89	6.4	80	$10 \times 5$	12.8	$5.08 \times 10^{- 14}$
[27]	Vertical	0.81	35	75	$8 \times 5$	87.5	$1.31 \times 10^{- 13}$
[20]	Vertical	0.95	1.3	103	$8 \times 5$	5.42	$2.15 \times 10^{- 14}$
[18]	Vertical, circular	1.05	6.4	67	$9 \times π$	22.6	$4.31 \times 10^{- 14}$
[21]	Vertical, DBR	0.72	7.9	31.7	$5 \times 5$	27.9	$6.98 \times 10^{- 14}$
This work	Vertical, CR	0.96	0.76	100	$4.8 \times 4.3$	3.68	$1.62 \times 10^{- 14}$

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Wei Chen, Yang Shi, Yilun Wang, Mingjie Zou, Wen Zhang, Yu Yu, Xinliang Zhang, "High-performance compact vertical germanium photodiodes enabled by silicon corner reflectors," Photonics Res. 12, 2983 (2024)

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