Silicon substrate-integrated hollow waveguide for miniaturized optical gas sensing

Shaonan Zheng; Hong Cai; Linfang Xu; Nanxi Li; Zhonghua Gu; Yao Zhang; Weiguo Chen; Yanyan Zhou; Qingxin Zhang; Lennon Yao Ting Lee

doi:10.1364/PRJ.439434

Photonics Research, Volume. 10, Issue 1, 261(2022)

Silicon substrate-integrated hollow waveguide for miniaturized optical gas sensing

Shaonan Zheng, Hong Cai, Linfang Xu, Nanxi Li^*, Zhonghua Gu, Yao Zhang, Weiguo Chen, Yanyan Zhou, Qingxin Zhang, and Lennon Yao Ting Lee

Author Affiliations

Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore 138634, Singapore

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Shaonan Zheng, Hong Cai, Linfang Xu, Nanxi Li, Zhonghua Gu, Yao Zhang, Weiguo Chen, Yanyan Zhou, Qingxin Zhang, Lennon Yao Ting Lee, "Silicon substrate-integrated hollow waveguide for miniaturized optical gas sensing," Photonics Res. 10, 261 (2022)

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Paper Information

Category: Integrated Optics

Received: Aug. 4, 2021

Accepted: Nov. 7, 2021

Published Online: Dec. 24, 2021

The Author Email: Nanxi Li (linx1@ime.a-star.edu.sg)

DOI:10.1364/PRJ.439434

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology