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Spectroscopy and Spectral Analysis, Volume. 35, Issue 5, 1376(2015)

Application of LIBS in Element Analysis of Nanometer Thin Film Prepared on Silicon Basement

SUN Yu-xiang1,2、*, ZHONG Shi-lei1,2, LU Yuan3, SUN Xin1,2, MA Jun-yan1,2, and LIU Zhe1,2
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    SUN Yu-xiang, ZHONG Shi-lei, LU Yuan, SUN Xin, MA Jun-yan, LIU Zhe. Application of LIBS in Element Analysis of Nanometer Thin Film Prepared on Silicon Basement[J]. Spectroscopy and Spectral Analysis, 2015, 35(5): 1376

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    Paper Information

    Received: Sep. 6, 2014

    Accepted: --

    Published Online: May. 26, 2015

    The Author Email: Yu-xiang SUN (492715025@qq.com)

    DOI:10.3964/j.issn.1000-0593(2015)05-1376-07

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology