Acta Optica Sinica, Volume. 29, Issue 9, 2520(2009)
Design of Extreme Ultraviolet Lithographic Objectives
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Yang Xiong, Xing Tingwen. Design of Extreme Ultraviolet Lithographic Objectives[J]. Acta Optica Sinica, 2009, 29(9): 2520
Paper Information
Category: Optical Design and Fabrication
Received: Nov. 30, 2008
Accepted: --
Published Online: Oct. 9, 2009
The Author Email: Xiong Yang (opticsy@yahoo.com.cn)
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