Acta Optica Sinica, Volume. 29, Issue 12, 3385(2009)
Wavefront Stitching Detection Method Based on Hartmann-Shack Wavefront Sensor
[3] [3] Masashi Otsubo,Katsuyuki Okada,Jumpei Tsujiuchi. Measurement of large plane surface shapes by connecting small-aperture interferograms[J]. Opt. Eng.,1994,33(2):608-613
[4] [4] Zhang Rongzhu,Shi Kaiqi,Xu Qiao et al.. Study on the experiments of the stitching interferometer[J]. Optical Technique,2004,30(2):173-175
[5] [5] Li Xinnan,Zhang Mingyi. Study on the sub-aperture stitching interferometry for large plano-optics[J]. Optical Tchinique,2006,32(4):514-517
[6] [6] T. D. Raymond,D. R. Neal,D. M. Topa et al.. High-speed,non-interferometric nanotopographic characterization of Si wafer surfaces[C]. SPIE,2002,4809:208-216
[7] [7] Jiang Wenhan,Li Huagui. Hartmann-Shack wavefront sensing and wavefront control algorithm[C]. SPIE,1990,1271:82-93
Get Citation
Copy Citation Text
Zheng Hanqing, Rao Changhui, Rao Xuejun, Jiang Wenhan, Yang Jinsheng. Wavefront Stitching Detection Method Based on Hartmann-Shack Wavefront Sensor[J]. Acta Optica Sinica, 2009, 29(12): 3385
Category: Instrumentation, Measurement and Metrology
Received: Jan. 7, 2009
Accepted: --
Published Online: Dec. 23, 2009
The Author Email: Zheng Hanqing (zhq.2468@gmail.com)