Microelectronics, Volume. 51, Issue 3, 418(2021)
Research on MEMS Microwave Power Sensor with Symmetric Double Cantilever Beams
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ZUO Wen, LIU Qicai, ZHANG Congchun, WANG Debo. Research on MEMS Microwave Power Sensor with Symmetric Double Cantilever Beams[J]. Microelectronics, 2021, 51(3): 418
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Received: Jul. 26, 2020
Accepted: --
Published Online: Mar. 11, 2022
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