Microelectronics, Volume. 51, Issue 3, 418(2021)

Research on MEMS Microwave Power Sensor with Symmetric Double Cantilever Beams

ZUO Wen, LIU Qicai, ZHANG Congchun, and WANG Debo
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  • [in Chinese]
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    In order to improve the measurement sensitivity of capacitive MEMS microwave power sensors, the internal space of the sensor was fully utilized, and a novel capacitive microwave power sensor based on symmetric double cantilever beams was proposed in this paper. Based on the structure of symmetric double cantilever beams, a pivoted electro-mechanical model was established, and the measurement sensitivity and overload power of the sensor were researched and analyzed. The results showed that the sensitivity of symmetric double-beam structure was three times higher than that of traditional single-beam structure with the same initial gap of the cantilever beam. Meanwhile, a wide-range tradeoff between sensor’s sensitivity and overload power could be realized by changing the initial gap of the cantilever beam. Therefore, the proposed symmetric double-beam structure could meet design demand widely.

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    ZUO Wen, LIU Qicai, ZHANG Congchun, WANG Debo. Research on MEMS Microwave Power Sensor with Symmetric Double Cantilever Beams[J]. Microelectronics, 2021, 51(3): 418

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    Paper Information

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    Received: Jul. 26, 2020

    Accepted: --

    Published Online: Mar. 11, 2022

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.200339

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