Microelectronics, Volume. 51, Issue 3, 418(2021)
Research on MEMS Microwave Power Sensor with Symmetric Double Cantilever Beams
In order to improve the measurement sensitivity of capacitive MEMS microwave power sensors, the internal space of the sensor was fully utilized, and a novel capacitive microwave power sensor based on symmetric double cantilever beams was proposed in this paper. Based on the structure of symmetric double cantilever beams, a pivoted electro-mechanical model was established, and the measurement sensitivity and overload power of the sensor were researched and analyzed. The results showed that the sensitivity of symmetric double-beam structure was three times higher than that of traditional single-beam structure with the same initial gap of the cantilever beam. Meanwhile, a wide-range tradeoff between sensor’s sensitivity and overload power could be realized by changing the initial gap of the cantilever beam. Therefore, the proposed symmetric double-beam structure could meet design demand widely.
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ZUO Wen, LIU Qicai, ZHANG Congchun, WANG Debo. Research on MEMS Microwave Power Sensor with Symmetric Double Cantilever Beams[J]. Microelectronics, 2021, 51(3): 418
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Received: Jul. 26, 2020
Accepted: --
Published Online: Mar. 11, 2022
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