Acta Optica Sinica, Volume. 34, Issue s1, 104001(2014)

Technology and Performance of Metal-Semiconductor-Metal AlGaN/GaN Heterostructure Ultraviolet Photodetector

Yang Lechen1,2,3、*, Fu Kai2,3, Shi Xueshun1,4, Chen Kunfeng1, Li Ligong1,4, and Zhang Baoshun2,3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    References(8)

    [1] [1] C K Wang, S J Chang, Y K Su, et al.. GaN MSM photodetectors with TiW transparent electrodes[J]. Mater Sci Eng B, 2004, 112(25): 228-230.

    [2] [2] M Asif Khan, J N Kuznia, D T Olson, et al.. Schottky barrier photodetector based on Mg-doped p-type GaN films[J]. Appl Phys Lett, 1993, 63(18): 2455-2456.

    [3] [3] I Ferguson, C A Tran, R F Karlicer, et al.. GaN and AlGaN metal-semiconductor-metal photodetectors[J]. Mater Sci Eng B, 1997, 50(1): 311-314.

    [4] [4] F Binet, J Y Duboz, N Laurent, et al.. Characteristics of quantum well infrared photodetectors[J]. J Appl Phys, 1997, 81(19): 6442-6449.

    [5] [5] M L Lee, J K Sheu, W C Lai, et al.. Characterzation of GaN Schottky barrier photodetectors with a low-temperature GaN cap layer[J]. J Appl Phys, 2003, 94(3): 1753-1577.

    [6] [6] L C Yang, R X Wang, S J Xu, et al.. Effects of annealing temperature on the characteristics of Ga-doped ZnO film metal-semiconductor-metal ultraviolet photodetectors [J]. J Appl Phys, 2013, 113(8): 084501.

    [7] [7] N W Emanetoglu, J Zhou, Y Chen, et al.. Surface acoustic wave ultraviolet photodetector using epitaxial ZnO multilayers grown on plane sapphire[J]. Appl Phys Lett, 2004, 85(17): 3702 -3704.

    [8] [8] R X Wang, L C Yang, S J Xu, et al.. Bias-voltage dependent ultraviolet photodetectors prepared by GaOx+ZnO mixture phase nanocrystalline thin films[J]. J Alloys and Compounds, 2013, 556: 201-205.

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    Yang Lechen, Fu Kai, Shi Xueshun, Chen Kunfeng, Li Ligong, Zhang Baoshun. Technology and Performance of Metal-Semiconductor-Metal AlGaN/GaN Heterostructure Ultraviolet Photodetector[J]. Acta Optica Sinica, 2014, 34(s1): 104001

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    Paper Information

    Category: Detectors

    Received: Dec. 16, 2013

    Accepted: --

    Published Online: Aug. 18, 2014

    The Author Email: Yang Lechen (yanglechen@163.com)

    DOI:10.3788/aos201434.s104001

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