Microelectronics, Volume. 51, Issue 3, 404(2021)

An Enhanced HEMT Using P-GaN Gate Combined with Recessed-Gate Technology

QIAO Jie and FENG Quanyuan
Author Affiliations
  • [in Chinese]
  • show less

    In order to obtain a high breakdown voltage and high threshold voltage enhancement-mode GaN device, a P-doped GaN (P-GaN) gate combined with recessed-gate AlGaN/GaN/AlGaN double heterojunction device was proposed. The threshold voltage of the device was up to 3.4 V, and the breakdown voltage was up to 738 V. Using Sentaurus TCAD for simulation, the threshold voltage and breakdown voltage of the traditional P-GaN gate and the P-GaN gate with recessed-gate AlGaN/GaN/AlGaN double heletrojunction device were compared. The results showed that, when the recessed-gate depth was changing at 5~13 nm, the threshold voltage increased with the recessed-gate depth, and the breakdown voltage first increased and then decreased slightly with the recessed-gate depth. The on resistance increased with the recessed-gate depth, and the minimum on resistance was 11.3 Ω·mm.

    Tools

    Get Citation

    Copy Citation Text

    QIAO Jie, FENG Quanyuan. An Enhanced HEMT Using P-GaN Gate Combined with Recessed-Gate Technology[J]. Microelectronics, 2021, 51(3): 404

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Jul. 10, 2020

    Accepted: --

    Published Online: Mar. 11, 2022

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.200312

    Topics