Extreme ultraviolet, X-ray and neutron optics are the high-precision observation methods for the development of modern science, which requires the support of different thin film optical components and systems with high quality. Due to the limitation of the short wavelength and optical constants of materials, the structure, optical performance and fabrication techniques of the short wavelength optical components are significantly different with those of the long wavelength optical components. The Institute of Precision Optical Engineering (IPOE) in Tongji University had 20 years research experience in this field. We have built a high-accuracy fabrication and detection platform based on the short wavelength mirrors, developed interface engineering methods for deposition of ultrathin multilayer film, extended the coated technology of large size mirrors, innovated the diffraction theory and fabrication process for high-efficiency/high-resolution multilayer nanostructures, preliminarily studied the basic damage mechanism of the mirrors under short wavelength irradiation, and formed a complete technology chain to develop thin films and crystal based optical systems. These optical components and systems have achieved a series of successful application in the short wavelength photon/neutron science facilities, both in China and in other countries. This paper will briefly introduce the recent research progress of the above mentioned optical components and systems in IPOE.