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Acta Optica Sinica, Volume. 26, Issue 7, 1107(2006)

Effect of Thickness Monitoring Error and Inhomogeneity of Witness Glass on Film Thickness Monitoring

[in Chinese]1,2、*, [in Chinese]1, [in Chinese]1, [in Chinese]1, and [in Chinese]1
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    [4] [4] H. A. Macleod. Thin-Film Optical Filters[M]. London: Institute of Physics Publishing,1999. 40～45

    [7] [7] A. Zller, R. Gtzelmann, K. Matel et al.. Temperature-stable bandpass filters deposited with ion-assisted deposition[J]. Appl. Opt., 1996, 35(28): 5609～5612

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Effect of Thickness Monitoring Error and Inhomogeneity of Witness Glass on Film Thickness Monitoring[J]. Acta Optica Sinica, 2006, 26(7): 1107

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    Paper Information

    Category: Thin Films

    Received: Sep. 20, 2005

    Accepted: --

    Published Online: Aug. 28, 2006

    The Author Email: (bree@siom.ac.cn)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology