Design of Wollaston Prism Used for Polarization Illumination System in ArF Lithography Tool

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Cai Yanmin, Wang Xiangzhao, Huang Huijie. Design of Wollaston Prism Used for Polarization Illumination System in ArF Lithography Tool[J]. Chinese Journal of Lasers, 2014, 41(6): 616002

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Paper Information

Category: Optical Design and Fabrication

Received: Dec. 5, 2013

Accepted: --

Published Online: Mar. 14, 2014

The Author Email: Yanmin Cai (caiyanmin@163.com)

DOI:10.3788/cjl201441.0616002

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology