Journal of Synthetic Crystals, Volume. 51, Issue 12, 2014(2022)

Processing and Characterization of 5 Inch InSb Wafer

ZHAO Chao*, KONG Zhongdi, DONG Tao, WU Qing, SHE Weilin, WANG Xiaolong, XU Pengyan, LI Qian, LI Da, and LI Congcong
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    References(13)

    [1] [1] BEUVILLE E, ACTON D, CORRALES E, et al. High performance large infrared and visible astronomy arrays for low background applications: instruments performance data and future developments at Raytheon[C]//Photonic Devices + Applications. Proc SPIE 6660, Infrared Systems and Photoelectronic Technology II, San Diego, California, USA. 2007, 6660: 7281.

    [2] [2] HOFFMAN A W, CORRALES E, LOVE P J, et al. 2K×2K InSb for astronomy[C]//SPIE Astronomical Telescopes + Instrumentation. Proc SPIE 5499, Optical and Infrared Detectors for Astronomy, Glasgow, United Kingdom, 2004, 5499: 5967.

    [3] [3] GERSHON G, ALBO A, EYLON M. Large format InSb infrared detector with 10 μm pixels[C]. International Symposium on Optronics in Defence and Security(OPTRO), Paris, France, 2014.

    [4] [4] GERSHON G, ALBO A, EYLON M, et al. 3 megapixel InSb detector with 10 μm pitch[C]//SPIE Defense, Security, and Sensing. Proc SPIE 8704, Infrared Technology and Applications XXXIX, Baltimore, Maryland, USA, 2013, 8704: 929938.

    [5] [5] FLINT P, ALLEN L P, DALLAS G, et al. CMP process comparison for 150 mm larger area InSb (111)B focal plane array substrates[C]//SPIE Security + Defence. Proc SPIE 7487, Optical Materials in Defence Systems Technology VI, Berlin, Germany, 2009, 7487: 7687.

    [6] [6] MARTINEZ R, AMIRHAGHI S, SMITH B, et al. Towards the production of very low defect GaSb and InSb substrates: bulk crystal growth, defect analysis and scaling challenges[C]//SPIE OPTO. Proc SPIE 8631, Quantum Sensing and Nanophotonic Devices X, San Francisco, California, USA, 2013, 8631: 321328.

    [7] [7] MERRELL J L, GRAY N W, BOLKE J G, et al. Enabling onaxis InSb crystal growth for highvolume wafer production: characterizing and eliminating variation in electrical performance for IR focal plane array applications[C]//SPIE Defense + Security. Proc SPIE 9819, Infrared Technology and Applications XLII, Baltimore, Maryland, USA, 2016, 9819: 285297.

    [8] [8] GRAY N W, PRAX A, ALEXANDER W B, et al. Interface engineering in InSb crystal growth for focal plane array device performance[C]//SPIE Defense+Security. Proc SPIE 10624, Infrared Technology and Applications XLIV, Orlando, Florida, USA, 2018, 10624: 142150.

    [9] [9] FURLONG M J, MARTINEZ R, AMIRHAGHI S, et al. Antimonide based infrared materials: developments in InSb and GaSb substrate technologies[C]//2010 22nd International Conference on Indium Phosphide and Related Materials (IPRM). Takamatsu, Japan, IEEE: 15.

    [10] [10] FURLONG M J, DALLAS G, MESHEW G, et al. Growth and characterization of 6"InSb substrates for use in largearea infraredimaging applications[C]//SPIE Defense + Security. Proc SPIE 9070, Infrared Technology and Applications XL, Baltimore, Maryland, USA, 2014, 9070: 341347.

    [11] [11] FURLONG M J, MARTINEZ R, AMIRHAGHI S, et al. Scaling up antimonide wafer production: innovation and challenges for epitaxy ready GaSb and InSb substrates[C]//SPIE Defense, Security, and Sensing. Proc SPIE 8012, Infrared Technology and Applications XXXVII, Orlando, Florida, USA, 2011, 8012: 363372.

    [12] [12] MARTINEZ B, FLINT J P, DALLAS G, et al. Standardizing large format 5″ GaSb and InSb substrate production[C]//SPIE Defense+Security. Proc SPIE 10177, Infrared Technology and Applications XLIII, Anaheim, California, USA, 2017, 10177: 597613.

    [13] [13] GRAY N W, PEREZRUBIO V, BOLKE J G, et al. Interface and facet control during Czochralski growth of (111) InSb crystals for cost reduction and yield improvement of IR focal plane array substrates[C]//SPIE Optical Engineering + Applications. Proc SPIE 9220, Infrared Sensors, Devices, and Applications IV, San Diego, California, USA, 2014, 9220: 1930.

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    ZHAO Chao, KONG Zhongdi, DONG Tao, WU Qing, SHE Weilin, WANG Xiaolong, XU Pengyan, LI Qian, LI Da, LI Congcong. Processing and Characterization of 5 Inch InSb Wafer[J]. Journal of Synthetic Crystals, 2022, 51(12): 2014

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    Paper Information

    Category:

    Received: May. 26, 2022

    Accepted: --

    Published Online: Feb. 18, 2023

    The Author Email: ZHAO Chao (zhaochaoxd@163.com)

    DOI:

    CSTR:32186.14.

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