Chinese Optics Letters, Volume. 6, Issue 3, 03222(2008)

Influence of purity of HfO2 on reflectance of ultraviolet multilayer

Jingmei Yuan, Hongji Qi, Yuan'an Zhao, Zhengxiu Fan, and Jianda Shao
Author Affiliations
  • R and D Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
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    Jingmei Yuan, Hongji Qi, Yuan'an Zhao, Zhengxiu Fan, Jianda Shao, "Influence of purity of HfO2 on reflectance of ultraviolet multilayer," Chin. Opt. Lett. 6, 03222 (2008)

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    Paper Information

    Received: Jun. 27, 2007

    Accepted: --

    Published Online: Mar. 27, 2008

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