Inline Optical Measurement and Inspection for IC Manufacturing: State-of-the-Art, Challenges, and Perspectives

Xiuguo Chen; Cai Wang; Tianjuan Yang; Jiamin Liu; Chengfeng Luo; Shiyuan Liu

doi:10.3788/LOP202259.0922025

Laser & Optoelectronics Progress, Volume. 59, Issue 9, 0922025(2022)

Inline Optical Measurement and Inspection for IC Manufacturing: State-of-the-Art, Challenges, and Perspectives

Xiuguo Chen^*, Cai Wang, Tianjuan Yang, Jiamin Liu, Chengfeng Luo, and Shiyuan Liu^**

State Key Laboratory of Digital Manufacturing and Equipment, Huazhong University of Science and Technology, Wuhan 430074, Hubei , China

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Xiuguo Chen, Cai Wang, Tianjuan Yang, Jiamin Liu, Chengfeng Luo, Shiyuan Liu. Inline Optical Measurement and Inspection for IC Manufacturing: State-of-the-Art, Challenges, and Perspectives[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922025

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Paper Information

Category: Optical Design and Fabrication

Received: Nov. 9, 2021

Accepted: Dec. 13, 2021

Published Online: May. 10, 2022

The Author Email: Xiuguo Chen (xiuguochen@hust.edu.cn), Shiyuan Liu (shyliu@hust.edu.cn)

DOI:10.3788/LOP202259.0922025

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology