[1] [1] MILLER A C. Single point diamond turning process development[J].Optical Fabrication ＆ Testing workshop,1992,13:22-25.

[2] [2] MAYERGOYZ I D.Mathematical Models of Hysteresis[M]. New York: Springer, 1991.

[3] [3] ZHANG B, ZHU Z.Developing a linear piezomotor with nanometer resolution and high stiffness[J].IEEE/ASME Trans. Mechatronic,1997,2(2-3):22-31.

[4] [4] TONG D, VELDHUIS S C. Control of a dual stage magnetostrictive actuator and linear motor feed drive system[J].International Journal of Advanced Manufacturing Technology,2007,33(3-4):379-388.

[5] [5] GE P, JOUANEH M. Modeling hysteresis in piezoceramic actuators [J].Precision Engineering,1995,11(6):211-232.

[6] [6] HUGHES D, WEN J T. Preisach modeling of piezoceramic and shape memory alloy hysteresis[J].SPIE,1996,28:1086-1091.

[7] [7] GE P, JOUANEH M. Generalized Preisach model for hysteresis nonlinearity of pizoceramic actuators[J].Precision Engineering,1997,12(4):99-111.

[8] [8] JOUANEH M, TIAN H. Accuracy enhancement of a piezoelectric actuator with hysteresis[J].ASME Symp. Flexible Automat,1992,23(6):631-638.