Fabrication of Convex Blazed Grating with High Diffraction Efficiency

Quan Liu; Jianhong Wu; Peiliang Guo; Xinhua Chen

doi:10.3788/CJL201946.0313001

Chinese Journal of Lasers, Volume. 46, Issue 3, 0313001(2019)

Fabrication of Convex Blazed Grating with High Diffraction Efficiency

Quan Liu^1,2,3、*, Jianhong Wu^1,2,3, Peiliang Guo¹, and Xinhua Chen^1,2,3

¹ School of Optoelectronic Science and Engineering, Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, Jiangsu 215006, China

² Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province, Soochow University, Suzhou, Jiangsu 215006, China

³ Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University, Suzhou, Jiangsu 215006, China

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Figures & Tables(10)

Fig. 1. Schematic of convex blazed grating

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$Relationship between diffraction efficiency and wavelength with different blaze angles.(a) β=5.9°; (b) β=6.5°; (c) β=7.1°$

Fig. 2. Relationship between diffraction efficiency and wavelength with different blaze angles.(a) β=5.9°; (b) β=6.5°; (c) β=7.1°

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$Relationship between diffraction efficiency and blaze angle with different wavelengths. (a) λ=0.4 μm; (b) λ=0.65 μm; (c) λ=0.9 μm$

Fig. 3. Relationship between diffraction efficiency and blaze angle with different wavelengths. (a) λ=0.4 μm; (b) λ=0.65 μm; (c) λ=0.9 μm

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Fig. 4. Fabrication process of convex blazed grating

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Fig. 5. AFM test result of convex blazed grating mask

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Fig. 6. Schematic of scanning ion beam etching principle

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Fig. 7. AFM test result of convex blazed grating

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$Optical path structure of measurement system of diffraction efficiency$

Fig. 8. Optical path structure of measurement system of diffraction efficiency

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$Relationship between diffraction efficiency of convex blazed grating and wavelength. (a) Achieved blazed grating; (b) ideal blazed grating$

Fig. 9. Relationship between diffraction efficiency of convex blazed grating and wavelength. (a) Achieved blazed grating; (b) ideal blazed grating

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Table 1. Measurement results of diffraction efficiency
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Table 1. Measurement results of diffraction efficiency
Wavelength /μm 0.41 0.50 0.60 0.70 0.80 0.89
Diffraction efficiency /% 51.71 69.51 69.69 61.78 55.57 43.04

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Quan Liu, Jianhong Wu, Peiliang Guo, Xinhua Chen. Fabrication of Convex Blazed Grating with High Diffraction Efficiency[J]. Chinese Journal of Lasers, 2019, 46(3): 0313001

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