Chinese Journal of Lasers, Volume. 46, Issue 3, 0313001(2019)
Fabrication of Convex Blazed Grating with High Diffraction Efficiency
The diffraction characteristics of the convex blazed grating are investigated by using rigorous coupled-wave analysis. The convex blazed grating with a central period of 2.45 μm, a curvature radius of 51.64 mm, and an aperture of 17 mm is fabricated by using holographic lithography-scanning ion beam etching method. The blazed angle is 6.4°, and the vertex angle is 141°. The results show that the first-order diffraction efficiency of the proposed grating is greater than 40% in the whole visible and near-infrared band, and the first-order diffraction efficiency at blaze wavelength is greater than 75%.
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Quan Liu, Jianhong Wu, Peiliang Guo, Xinhua Chen. Fabrication of Convex Blazed Grating with High Diffraction Efficiency[J]. Chinese Journal of Lasers, 2019, 46(3): 0313001
Category: micro and nano optics
Received: Sep. 26, 2018
Accepted: Dec. 4, 2018
Published Online: May. 9, 2019
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