Acta Optica Sinica, Volume. 43, Issue 3, 0334002(2023)
Design of Submicron Resolution Wolter Microscope
Fig. 3. Image spot diagrams for different field of view. (a) (0.7, -0.7); (b) (0, -0.7); (c) (-0.7, -0.7); (d) (0.7, 0); (e) (0, 0); (f) (-0.7, 0); (g) (0.7, 0.7); (h) (0, 0.7); (i) (-0.7, 0.7)
Fig. 4. Effects of mirror shape accuracy on spatial resolution under the roughness of 0.3 nm
Fig. 7. Effective collection efficiency of the system (considering the effects of geometric solid angle and multilayer reflectivity). (a) General drawing; (b) line profile in the horizontal direction; (c) line profile in the vertical direction
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Yaran Li. Design of Submicron Resolution Wolter Microscope[J]. Acta Optica Sinica, 2023, 43(3): 0334002
Category: X-Ray Optics
Received: Jul. 18, 2022
Accepted: Aug. 31, 2022
Published Online: Feb. 13, 2023
The Author Email: Li Yaran (liyaran@mail.sitp.ac.cn)