Acta Optica Sinica, Volume. 43, Issue 3, 0334002(2023)

Design of Submicron Resolution Wolter Microscope

Yaran Li1,2、*
Author Affiliations
  • 1Key Laboratory of Intelligent Infrared Perception, Chinese Academy of Sciences, Shanghai 200083, China
  • 2Key Laboratory of Infrared System Detection and Imaging Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
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    Figures & Tables(11)
    Optical configuration of the open Wolter microscope
    Imaging lightpath of the open Wolter microscope
    Image spot diagrams for different field of view. (a) (0.7, -0.7); (b) (0, -0.7); (c) (-0.7, -0.7); (d) (0.7, 0); (e) (0, 0); (f) (-0.7, 0); (g) (0.7, 0.7); (h) (0, 0.7); (i) (-0.7, 0.7)
    Effects of mirror shape accuracy on spatial resolution under the roughness of 0.3 nm
    Changes to the system spatial resolution along the optical axis
    Reflectivity curves of Cr/C periodic multilayer films
    Effective collection efficiency of the system (considering the effects of geometric solid angle and multilayer reflectivity). (a) General drawing; (b) line profile in the horizontal direction; (c) line profile in the vertical direction
    • Table 1. Effects of mirror length on system performance

      View table

      Table 1. Effects of mirror length on system performance

      Mirror length /mmGeometric solid angle /(10-5 sr)RMS blurred circle radius along meridian direction /μmRMS blurred circle radius along sagittal direction /μm
      102.420.310.39
      153.730.460.57
      205.120.620.77
      256.580.710.94
    • Table 2. Effects of mirror width on system performance

      View table

      Table 2. Effects of mirror width on system performance

      Mirror width /mmGeometric solid angle /(10-5 sr)RMS blurred circle radius along meridian direction /μmRMS blurred circle radius along sagittal direction /μm
      21.860.450.55
      43.730.460.57
      87.470.500.63
      1514.100.630.81
    • Table 3. System-level technical specifications of Wolter microscope

      View table

      Table 3. System-level technical specifications of Wolter microscope

      ParameterNominal object distance /mmNominal grazing angle /(°)

      Magnification

      factor

      Energy point /keVSpatial resolution /μmField of view /mmGeometric solid angle /sr
      Value2502352.5<1±0.353.73×10-5
    • Table 4. Optical parameters of Wolter reflecting mirror

      View table

      Table 4. Optical parameters of Wolter reflecting mirror

      ParameterHyperboloid mirrorEllipsoid mirror
      Object distance /mm240.5260.2
      Grazing angle /(°)2.0591.983
      Half-axis length a133.04634.2
      Half-axis length b12.674.3
      Mirror length /mm15.016.3
      Mirror width /mm4.04.0
      Turning radius /mm33.234.5
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    Yaran Li. Design of Submicron Resolution Wolter Microscope[J]. Acta Optica Sinica, 2023, 43(3): 0334002

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    Paper Information

    Category: X-Ray Optics

    Received: Jul. 18, 2022

    Accepted: Aug. 31, 2022

    Published Online: Feb. 13, 2023

    The Author Email: Li Yaran (liyaran@mail.sitp.ac.cn)

    DOI:10.3788/AOS221492

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