Chinese Journal of Lasers, Volume. 43, Issue 6, 602008(2016)
Sub-Micron-Structure Array on Silicon Surface Fabricated by Dielectric Microsphere Assisted Laser Irradiation Followed by Chemical Etching
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Lin Zhenyuan, Ji Lingfei, Wu Yan, Lü Xiaozhan, Jiang Yijian. Sub-Micron-Structure Array on Silicon Surface Fabricated by Dielectric Microsphere Assisted Laser Irradiation Followed by Chemical Etching[J]. Chinese Journal of Lasers, 2016, 43(6): 602008
Paper Information
Category: laser manufacturing
Received: Jan. 11, 2016
Accepted: --
Published Online: Jun. 6, 2016
The Author Email: Zhenyuan Lin (zero0_0@bjut.edu.cn)
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