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Chinese Optics Letters, Volume. 9, Issue 8, 082101(2011)

Laser direct writing pattern structures on AgInSbTe phase change thin film

Aihuan Dun1,2, Jingsong Wei1, and Fuxi Gan1
Author Affiliations
  • 1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Graduate University of Chinese Academy of Sciences, Beijing 100049, China
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    Cited By (18)
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    References(17)

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    CLP Journals

    [1] Kui Zhang, Zhimin Chen, Yongyou Geng, Yang Wang, Yiqun Wu, "Nanoscale-resolved patterning on metal hydrazone complex thin films using diode-based maskless laser writing in the visible light regime," Chin. Opt. Lett. 14, 051401 (2016)

    [2] Kui Zhang, Zhengwei Wang, Guodong Chen, Yang Wang, Aijun Zeng, Jing Zhu, Syarhei Avakaw, Heorgi Tsikhanchuk, "Te-free SbBi thin film as a laser heat-mode photoresist," Chin. Opt. Lett. 17, 093102 (2019)

    Cited By

    [1] Aihuan Dun, Jingsong Wei, Hongxia Zhao. Focused ion beam milled pattern structures induced by laser pulse on AgInSbTe phase change films. Materials Letters, 66, 324(2012).

    [2] I Voynarovych, S Schroeter, R Poehlmann, M Vlcek. Surface corrugating direct laser writing of microstructures in ternary chalcogenide films using a continuous-wave super-bandgap laser. Journal of Physics D: Applied Physics, 48, 265106(2015).

    [3] Hao Li, Rui Wang, Yong-You Geng, Yi-Qun Wu, Jing-Song Wei. Enhancement Effect of Patterning Resolution Induced by an Aluminum Thermal Conduction Layer with AgInSbTe as a Laser Thermal Lithography Film. Chinese Physics Letters, 29, 074401(2012).

    [4] Jingsong Wei, Yang Wang, Yiqun Wu. Manipulation of heat-diffusion channel in laser thermal lithography. Optics Express, 22, 32470(2014).

    [5] Peijun Zhao, Jinlun Zheng, Kui Zhang, Yang Wang, Jingsong Wei. Ge?Sb Thin Films Patterned by Heat‐Mode Lithography. physica status solidi (RRL) – Rapid Research Letters, 2100545(2022).

    [6] Jingsong Wei. Laser Heat-Mode Lithography, 291, 123(2019).

    [7] Fuxi Gan, Zhitang Song, Qijun Zhou, Kui Zhang, Tao Wei, Jingsong Wei. High resolution patterning on AgInSbTe thin films by laser thermal lithography . 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage, 9818, 98180Y(2016).

    [8] Jingsong Wei. Laser Heat-Mode Lithography, 291, 105(2019).

    [9] Jingsong Wei. Nonlinear Super-Resolution Nano-Optics and Applications, 191, 225(2015).

    [10] Rui Wang, Jingsong Wei, Yongtao Fan. Chalcogenide phase-change thin films used as grayscale photolithography materials. Optics Express, 22, 4973(2014).

    [11] Jingsong Wei, Rui Wang. Maskless direct laser writing with visible light: Breaking through the optical resolving limit with cooperative manipulations of nonlinear reverse saturation absorption and thermal diffusion. Journal of Applied Physics, 115, 123102(2014).

    [12] Rui Wang, Jingsong Wei. Parabolic approximation analytical model of super-resolution spot generation using nonlinear thin films: Theory and simulation. Optics Communications, 316, 220(2014).

    [13] Xiaolin Cai, Jingsong Wei. Temperature dependence of the thermal properties of InSb materials used in data storage. Journal of Applied Physics, 114, 083507(2013).

    [14] Jingsong Wei. Laser Heat-Mode Lithography, 291, 27(2019).

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    Aihuan Dun, Jingsong Wei, Fuxi Gan, "Laser direct writing pattern structures on AgInSbTe phase change thin film," Chin. Opt. Lett. 9, 082101 (2011)

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    Paper Information

    Category: OPTICAL DATA STORAGE

    Received: Dec. 31, 2010

    Accepted: Mar. 15, 2011

    Published Online: Jun. 1, 2011

    The Author Email:

    DOI:10.3788/COL201109.082101

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology