Photonics Research, Volume. 13, Issue 9, 2531(2025)

Ultracompact 4H-silicon carbide optomechanical resonator with fm · Qm exceeding 1013 Hz Spotlight on Optics

Yuncong Liu1, Wenhan Sun2, Hamed Abiri3, Philip X.-L. Feng1,4、*, and Qing Li2,5、*
Author Affiliations
  • 1Department of Electrical and Computer Engineering, University of Florida, Gainesville, Florida 32611, USA
  • 2Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania 15213, USA
  • 3School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, USA
  • 4e-mail: philip.feng@ufl.edu
  • 5e-mail: qingli2@andrew.cmu.edu
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    References(49)

    [33] S. Chandorkar, M. Agarwal, R. Melamud. Limits of quality factor in bulk-mode micromechanical resonators. IEEE 21st International Conference on Micro Electro Mechanical Systems, 74-77(2008).

    [46] A. N. Cleland. Foundations of Nanomechanics: From Solid-state Theory to Device Applications(2013).

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    Yuncong Liu, Wenhan Sun, Hamed Abiri, Philip X.-L. Feng, Qing Li, "Ultracompact 4H-silicon carbide optomechanical resonator with fm · Qm exceeding 1013 Hz," Photonics Res. 13, 2531 (2025)

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    Paper Information

    Category: Integrated Optics

    Received: May. 14, 2025

    Accepted: Jun. 23, 2025

    Published Online: Aug. 25, 2025

    The Author Email: Philip X.-L. Feng (philip.feng@ufl.edu), Qing Li (qingli2@andrew.cmu.edu)

    DOI:10.1364/PRJ.567674

    CSTR:32188.14.PRJ.567674

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