Fig. 1. Structure of two-dimensional time-grating sensor

Fig. 2. Dimension judgment windings and displacement sensing windings of the moving scale

Fig. 3. Two-dimensional displacement measurement scheme

Fig. 4. Different installation attitudes of sensor moving scale

Fig. 5. Influence of different air gaps on measurement accuracy within a cycle of sensing units

Fig. 6. Rolling diagram of moving scale

Fig. 7. Influence of different rolling angles on measuring accuracy within a cycle of sensing units

Fig. 8. Pitch diagram of moving scale

Fig. 9. Influence of different pitch angles on measuring accuracy within a cycle of sensing units

Fig. 10. Yaw diagram of moving scale

Fig. 11. Influence of different yaw angles on measurement accuracy within a cycle of sensing units

Fig. 12. Prototype of sensor

Fig. 13. Experimental platform

Fig. 14. Measuring errors of different air gaps in X and Y directions within a cycle of sensing units

Fig. 15. Measuring errors of different rolling angles in X and Y directions within a cycle of sensing units

Fig. 16. Measuring errors of different pitch angles in X and Y directions within a cycle of sensing units

Fig. 17. Measuring errors of different yaw angles in X and Y directions within a cycle of sensing units

Fig. 18. Measuring route diagram

Fig. 19. Measuring values within 240 mm×240 mm

Fig. 20. Full-range measuring errors of X direction

Fig. 21. Full-range measuring errors of Y direction