Piezoelectrics & Acoustooptics, Volume. 45, Issue 1, 105(2023)
Study on Sensing Mechanism of Single-Axis MEMS Thermal Accelerometer with Dynamic Heat Source Pendulum
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PIAO Linhua, TONG Jiacheng, LI Bei, ZHANG Yan. Study on Sensing Mechanism of Single-Axis MEMS Thermal Accelerometer with Dynamic Heat Source Pendulum[J]. Piezoelectrics & Acoustooptics, 2023, 45(1): 105
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Received: May. 15, 2022
Accepted: --
Published Online: Apr. 7, 2023
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