Piezoelectrics & Acoustooptics, Volume. 45, Issue 1, 105(2023)

Study on Sensing Mechanism of Single-Axis MEMS Thermal Accelerometer with Dynamic Heat Source Pendulum

PIAO Linhua, TONG Jiacheng, LI Bei, and ZHANG Yan
Author Affiliations
  • [in Chinese]
  • show less

    The sensing mechanism of a dynamic thermal source pendulum single-axis MEMS thermal accelerometer was revealed in this paper. Based on the principle of the sensitive structure, the temperature field inside the sensitive structure is calculated by establishing the two-dimensional physical research model, meshing the grid, loading the acceleration and other methods. The results show that a stable temperature field centered at the dynamic heat source is formed within the sensitive structure after 1.8 s of power-on. When inputting the acceleration a, the dynamic heat source shifts along the direction of acceleration, then the temperature field is shifted. The temperature difference ΔTX between the two hot lines symmetrically set in the direction of sensitive axis increases linearly with the increase of input acceleration a, and the temperature sensitivity is 7.1×10-2 mK/g. According to the input-output characteristic a-VXOUT curve, the mathematical model is given, and the sensitivity of accelerometer is 0.5 V/g, and the nonlinearity is 2.8%, which reveals the sensing mechanism.

    Tools

    Get Citation

    Copy Citation Text

    PIAO Linhua, TONG Jiacheng, LI Bei, ZHANG Yan. Study on Sensing Mechanism of Single-Axis MEMS Thermal Accelerometer with Dynamic Heat Source Pendulum[J]. Piezoelectrics & Acoustooptics, 2023, 45(1): 105

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: May. 15, 2022

    Accepted: --

    Published Online: Apr. 7, 2023

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2023.01.020

    Topics