Fig. 1. Operating principle of optical phased array

Fig. 2. Operating principle of one-dimensional optical phased array phase-shift scanning

Fig. 3. Operating principle of a silicon-based optical phased array lidar antenna based on cascade

Fig. 4. The technical principle of the silicon-based optical phased array lidar antenna based on cascade

Fig. 5. Schematic of waveguide superlattice structure

Fig. 6. Simulation results of subwavelength spacing waveguide superlattice crosstalk

Fig. 7. Statistical distribution of crosstalk in waveguide superlattice structures

Fig. 8. Images of the stacking process

Fig. 9. Deflection results of four-channel stacked optical phased array beams