Chinese Journal of Lasers, Volume. 45, Issue 1, 104005(2018)
Design of Five Degree of Freedom Parallel Locating Mechanism for Mosaic Gratings
Figures & Tables(7)
Fig. 1. Mechanism of mosaic gratings. (a) Adjusting principle of five degrees of freedom of the sub-gratings; (b) design model of grating mosaic device
Fig. 4. Mode analysis results of grating mosaic mechanism. (a) First order frequency and mode; (b) second order nature frequency and mode
Fig. 6. Image of far-field focal spot by experiment. (a) Before coplanar adjustment; (b) after coplanar adjustment
Table 1. Results of displacement adjustment of mosaic grating by FEM
View tableTable 1. Results of displacement adjustment of mosaic grating by FEM
Item Macro-actuation Micro-actuation Δ x =500 μmΔ z =500 μmΔ x =12.5 μmΔ z =12.5 μmΔ x /μm500±0.21 0.17 12.5±0.005 0.005 Δ z /μm0.33 500±0.18 0.008 12.5±0.005 Δ θx /μrad0.03 0.01 0 0 Δ θy /μrad-3.33 0.22 0.085 0 Δ θz /μrad0.01 -0.03 0 0
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Yu Fuli, Lu Lihua, Zhang Qingchun. Design of Five Degree of Freedom Parallel Locating Mechanism for Mosaic Gratings[J]. Chinese Journal of Lasers, 2018, 45(1): 104005
Paper Information
Category: Measurement and metrology
Received: Aug. 14, 2017
Accepted: --
Published Online: Jan. 24, 2018
The Author Email: Fuli Yu (cxfjs@hit.edu.cn)
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