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Acta Optica Sinica, Volume. 43, Issue 10, 1012004(2023)

Double-Surface Simultaneous Measurement of Micro-Lenses Based on Deflectometry

Yang Ruan, Ming Kong, Jinchao Dou, Jing Yu, Hangbo Hua, Shiling Wang, and Wei Liu*
Author Affiliations
  • College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, Zhejiang , China
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    References (24)
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    Figures & Tables(7)
    Schematic of freeform micro-lens measurement system based on computer-aided deflectometry

    Fig. 1. Schematic of freeform micro-lens measurement system based on computer-aided deflectometry

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    Flow chart for micro-lens multisurface testing based on deflectometry

    Fig. 2. Flow chart for micro-lens multisurface testing based on deflectometry

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    Schematic of the system ray tracing model

    Fig. 3. Schematic of the system ray tracing model

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    Reconstruction results of micro-lens double-surfaces. (a) Original wavefront; (b) wavefront at the Tx10°; (c) wavefront at the Ty10°; (d) wavefront at the flip position; (e) nominal front surface of tested micro-lens; (f) nominal rear surface of tested micro-lens; (g) reconstructed front surface of tested micro-lens; (h) reconstructed rear surface of tested micro-lens; (i) residual error of front surface; (j) residual error of rear surface

    Fig. 4. Reconstruction results of micro-lens double-surfaces. (a) Original wavefront; (b) wavefront at the Tx10°; (c) wavefront at the Ty10°; (d) wavefront at the flip position; (e) nominal front surface of tested micro-lens; (f) nominal rear surface of tested micro-lens; (g) reconstructed front surface of tested micro-lens; (h) reconstructed rear surface of tested micro-lens; (i) residual error of front surface; (j) residual error of rear surface

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    Photo of experiment system and micro-lens

    Fig. 5. Photo of experiment system and micro-lens

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    Reconstruction results of micro-lens double-surfaces in the experiment. (a) Acquired fringes in x direction at the original position; (b) acquired fringes in x direction at the Tx10°; (c) acquired fringes in x direction at the Ty10°; (d) acquired fringes in x direction at the flip position; (e) transmitted wavefront at the original position; (f) transmitted wavefront at the Tx10°; (g) transmitted wavefront at the Ty10°; (h) transmitted wavefront at the flip position; (i) reconstructed front surface of tested micro-lens; (j) reconstructed rear surface of tested micro-lens; (k) measured front surface of tested micro-lens by Zygo interferometer; (l) measured rear surface of tested micro-lens by Zygo interferometer

    Fig. 6. Reconstruction results of micro-lens double-surfaces in the experiment. (a) Acquired fringes in x direction at the original position; (b) acquired fringes in x direction at the Tx10°; (c) acquired fringes in x direction at the Ty10°; (d) acquired fringes in x direction at the flip position; (e) transmitted wavefront at the original position; (f) transmitted wavefront at the Tx10°; (g) transmitted wavefront at the Ty10°; (h) transmitted wavefront at the flip position; (i) reconstructed front surface of tested micro-lens; (j) reconstructed rear surface of tested micro-lens; (k) measured front surface of tested micro-lens by Zygo interferometer; (l) measured rear surface of tested micro-lens by Zygo interferometer

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    • Table 1. Comparison of Zernike fringe coefficients of experiment

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      Table 1. Comparison of Zernike fringe coefficients of experiment

      Zernike fringe coefficientReconstruction front surfaceReconstruction rear surfaceZygo measured front surfaceZygo measured rear surface
      Z52.7540×10-53.4181×10-52.8090×10-53.0180×10-5
      Z66.0533×10-5-2.4578×10-56.0510×10-5-2.4480×10-5
      Z7-3.2533×10-5-5.4239×10-7-3.1060×10-5-5.4000×10-7
      Z8-6.3719×10-5-2.9232×10-6-6.3470×10-5-2.9500×10-6
      Z94.9454×10-6-7.6977×10-64.6100×10-6-8.1200×10-6
      Z108.2940×10-5-1.2219×10-57.8870×10-5-1.3560×10-5
      Z11-1.6124×10-53.3964×10-7-1.7420×10-53.9000×10-7
      Z12-1.5612×10-5-1.0878×10-5-1.2910×10-5-1.2230×10-5
      Z13-2.0249×10-7-4.9644×10-6-1.2300×10-6-3.5700×10-6
      Z14-1.5036×10-56.1225×10-6-2.2600×10-63.8100×10-6
      Z152.0350×10-66.4506×10-61.2000×10-64.8100×10-6
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    Yang Ruan, Ming Kong, Jinchao Dou, Jing Yu, Hangbo Hua, Shiling Wang, Wei Liu. Double-Surface Simultaneous Measurement of Micro-Lenses Based on Deflectometry[J]. Acta Optica Sinica, 2023, 43(10): 1012004

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Nov. 11, 2022

    Accepted: Jan. 3, 2023

    Published Online: May. 9, 2023

    The Author Email: Liu Wei (liuw@cjlu.edu.cn)

    DOI:10.3788/AOS221973

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology