Journal of Semiconductors, Volume. 43, Issue 5, 054101(2022)
Effect of charge trapping on electrical characteristics of silicon junctionless nanowire transistor
Fig. 1. (Color online) Schematic diagrams of the fabrication process for JNTs.
Fig. 2. (Color online) (a) The color SEM image of devices with the gate length of 280 nm. (b) The cross-section schematics of the devices.
Fig. 3. (Color online) Measured drain current characteristics at room temperature, showing (a) drain current versus gate voltage for drain voltages of 0.1 to 4.1 V with step of 1 V, and (b) drain current versus drain voltage for gate voltages from 1 to 4 V with step of 1 V.
Fig. 4. (Color online) (a)
Fig. 5. (Color online) (a)
Fig. 6. (Color online) ln(
Fig. 7. (Color online) (a) Transfer characteristics at the temperatures of 100 to 300 K with the step of 50 K. (b) Measured
Fig. 8. (Color online) (a) Simulated
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Yifan Fu, Liuhong Ma, Zhiyong Duan, Weihua Han. Effect of charge trapping on electrical characteristics of silicon junctionless nanowire transistor[J]. Journal of Semiconductors, 2022, 43(5): 054101
Category: Articles
Received: Dec. 24, 2021
Accepted: --
Published Online: Jun. 10, 2022
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