International Journal of Extreme Manufacturing, Volume. 7, Issue 3, 35004(2025)

3D laser structuring of supermetalphobic microstructures inside elastomer for multilayer high-density interconnect soft electronics

Zhang Chengjun, Yang Qing, Li Haoyu, Luo Zexiang, Lu Yu, Zhang Jialiang, Li Cheng, and Chen Feng
References(44)

[1] [1] Matsuhisa N, Chen X D, Bao Z N and Someya T 2019 Materials and structural designs of stretchable conductorsChem. Soc. Rev.482946–66

[2] [2] Boutry C Met al2019 Biodegradable and flexible arterial-pulse sensor for the wireless monitoring of blood flowNat. Biomed. Eng.347–57

[3] [3] Nan K W, Babaee S, Chan W W, Kuosmanen J L P, Feig V R, Luo Y Y, Srinivasan S S, Patterson C M, Jebran A M and Traverso G 2022 Low-cost gastrointestinal manometry via silicone-liquid-metal pressure transducers resembling a quipuNat. Biomed. Eng.61091–104

[4] [4] Niu S Met al2019 A wireless body area sensor network based on stretchable passive tagsNat. Electron.2361–8

[5] [5] Wang Met al2020 Gesture recognition using a bioinspired learning architecture that integrates visual data with somatosensory data from stretchable sensorsNat. Electron.3563–70

[6] [6] Kim D-Het al2011 Epidermal electronicsScience333838–43

[7] [7] Kim M-G, Brown D K and Brand O 2020 Nanofabrication for all-soft and high-density electronic devices based on liquid metalNat. Commun.111002

[8] [8] Chen S C, Qian G C, Ghanem B, Wang Y Q, Shu Z, Zhao X F, Yang L, Liao X Q and Zheng Y J 2022 Quantitative and real-time evaluation of human respiration signals with a shape-conformal wireless sensing systemAdv. Sci.92203460

[9] [9] Lee Wet al2022 Universal assembly of liquid metal particles in polymers enables elastic printed circuit boardScience378637–41

[10] [10] Huang Z Let al2018 Three-dimensional integrated stretchable electronicsNat. Electron.1473–80

[11] [11] Hui Y, Yao Y, Qian Q L, Luo J H, Chen H H, Qiao Z, Yu Y T, Tao L and Zhou N J 2022 Three-dimensional printing of soft hydrogel electronicsNat. Electron.5893–903

[12] [12] Li G Qet al2023 Three-dimensional flexible electronics using solidified liquid metal with regulated plasticityNat. Electron.6154–63

[13] [13] Cheng J X, Yu S Y, Wang R and Ge Q 2024 Digital light processing based multimaterial 3D printing: challenges, solutions and perspectivesInt. J. Extrem. Manuf.6042006

[14] [14] Kamyshny A and Magdassi S 2019 Conductive nanomaterials for 2D and 3D printed flexible electronicsChem. Soc. Rev.481712–40

[15] [15] Choi S, Han S I, Kim D, Hyeon T and Kim D-H 2019 High-performance stretchable conductive nanocomposites: materials, processes, and device applicationsChem. Soc. Rev.481566–95

[16] [16] Hammock M L, Chortos A, Tee B C K, Tok J B H and Bao Z N 2013 25th anniversary article: the evolution of electronic skin (E-skin): a brief history, design considerations, and recent progressAdv. Mater.255997–6038

[17] [17] Bandodkar A J, Nuez-flores R, Jia W Z and Wang J 2015 All-printed stretchable electrochemical devicesAdv. Mater.273060–5

[18] [18] Gao Y Jet al2017 Wearable micro fluidic diaphragm pressure sensor for health and tactile touch monitoringAdv. Mater.291701985

[19] [19] Li Xet al2020 Ultracomfortable hierarchical nanonetwork for highly sensitive pressure sensorACS Nano149605–12

[20] [20] Daeneke T, Khoshmanesh K, Mahmood N, de Castro I A, Esrafilzadeh D, Barrow S J, Dickey M D and Kalantar-Zadeh K 2018 Liquid metals: fundamentals and applications in chemistryChem. Soc. Rev.474073–111

[21] [21] Chen Y Yet al2024 High-performance liquid metal electromagnetic actuator fabricated by femtosecond laserInt. J. Extrem. Manuf.6025503

[22] [22] Dickey M D 2017 Stretchable and soft electronics using liquid metalsAdv. Mater.291606425

[23] [23] Lazarus N, Bedair S S and Kierzewski I M 2017 Ultrafine pitch stencil printing of liquid metal alloysACS Appl. Mater. Interfaces91178–82

[24] [24] Hao X P, Li C Y, Zhang C W, Du M, Ying Z M, Zheng Q and Wu Z L 2021 Self-shaping soft electronics based on patterned hydrogel with stencil-printed liquid metalAdv. Funct. Mater.312105481

[25] [25] Lin Y, Gordon O, Rashed Khan M, Vasquez N, Genzer J and Dickey M D 2017 Vacuum filling of complex microchannels with liquid metalLab Chip173043–50

[26] [26] Kim J-H, Kim S, Kim H, Wooh S, Cho J, Dickey M D, So J-H and Koo H-J 2022 Imbibition-induced selective wetting of liquid metalNat. Commun.134763

[27] [27] Kramer R K, Majidi C and Wood R J 2013 Masked deposition of gallium-indium alloys for liquid-embedded elastomer conductorsAdv. Funct. Mater.235292–6

[28] [28] Park Y-G, An H S, Kim J-Y and Park J-U 2019 High-resolution, reconfigurable printing of liquid metals with three-dimensional structuresSci. Adv.5eaaw2844

[29] [29] Wu P C, Fu J Z, Xu Y T and He Y 2022 Liquid metal microgels for three-dimensional printing of smart electronic clothesACS Appl. Mater. Interfaces1413458–67

[30] [30] Kim M-G, Alrowais H and Brand O 2018 3D-integrated and multifunctional all-soft physical microsystems based on liquid metal for electronic skin applicationsAdv. Electron. Mater.41700434

[31] [31] Ma Z Jet al2021 Permeable superelastic liquid-metal fibre mat enables biocompatible and monolithic stretchable electronicsNat. Mater.20859–68

[32] [32] Wu Q, Zhu F B, Wu Z L, Xie Y, Qian J, Yin J and Yang H Y 2022 Suspension printing of liquid metal in yield-stress fluid for resilient 3D constructs with electromagnetic functionsnpj Flex. Electron.650

[33] [33] Lu Y, Kai L, Chen C Y, Yang Q, Meng Y Z, Liu Y, Cheng Y, Hou X and Chen F 2022 Nanochannels with a 18-nm feature size and ultrahigh aspect ratio on silica through surface assisting material ejectionAdv. Photon. Nexus1026004

[34] [34] Zhang Y X, Wu D, Zhang Y C, Bian Y C, Wang C W, Li J W, Chu J R and Hu Y L 2023 Femtosecond laser direct writing of functional stimulus-responsive structures and applicationsInt. J. Extrem. Manuf.5042012

[35] [35] Sugioka K 2019 Hybrid femtosecond laser three-dimensional micro- and nanoprocessing: a reviewInt. J. Extrem. Manuf.1012003

[36] [36] Jeon J, Lee J-B, Chung S K and Kim D 2017 On-demand magnetic manipulation of liquid metal in micro fluidic channels for electrical switching applicationsLab Chip17128–33

[37] [37] Li G Y, Parmar M, Kim D, Lee J B and Lee D-W 2014 PDMS based coplanar micro fluidic channels for the surface reduction of oxidized GalinstanLab Chip14200–9

[38] [38] Smith G L, Gesell A S, Restaino M, Tyler J B, Xu X, Sochol R D, Bergbreiter S and Lazarus N 2024 3D-printed multi-scale fluidics for liquid metalsAdv. Mater. Technol.92301980

[39] [39] Lazarus N, Meyer C D and Bedair S S 2015 Stretchable inductor designIEEE Trans. Electron Devices622270–7

[40] [40] Fassler A and Majidi C 2013 Soft-matter capacitors and inductors for hyperelastic strain sensing and stretchable electronicsSmart Mater. Struct.22055023

[41] [41] Veerapandian Set al2021 Hydrogen-doped viscoplastic liquid metal microparticles for stretchable printed metal linesNat. Mater.20533–40

[42] [42] Wang Y Q, Zhang C J, Meng X L, Zhang Q S, Li H Y, Chen F, Yang Q, Zhang W Q, Zheng Y J and Chen S C 2023 Quantitative and real-time evaluation of pressure on brain spatula with wireless and compact sensing systemAdv. Funct. Mater.332210596

[43] [43] Zhang C J, Li Z K, Li H Y, Yang Q, Wang H, Shan C, Zhang J Z, Hou X and Chen F 2022 Femtosecond laser-induced supermetalphobicity for design and fabrication of flexible tactile electronic skin sensorACS Appl. Mater. Interfaces1438328–38

[44] [44] Yong J L, Zhang C J, Bai X, Zhang J Z, Yang Q, Hou X and Chen F 2020 Designing “supermetalphobic” surfaces that greatly repel liquid metal by femtosecond laser processing: does the surface chemistry or microstructure play a crucial role?Adv. Mater. Interfaces71901931

Tools

Get Citation

Copy Citation Text

Zhang Chengjun, Yang Qing, Li Haoyu, Luo Zexiang, Lu Yu, Zhang Jialiang, Li Cheng, Chen Feng. 3D laser structuring of supermetalphobic microstructures inside elastomer for multilayer high-density interconnect soft electronics[J]. International Journal of Extreme Manufacturing, 2025, 7(3): 35004

Download Citation

EndNote(RIS)BibTexPlain Text
Save article for my favorites
Paper Information

Category:

Received: Jul. 23, 2024

Accepted: Sep. 29, 2025

Published Online: Sep. 29, 2025

The Author Email:

DOI:10.1088/2631-7990/ada835

Topics