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Acta Optica Sinica, Volume. 32, Issue 7, 705002(2012)

Wavefront Aberration Analysis of the Interference Image According to Different Axis Alignment Errors in the Grating Exposure System

Han Jian1,2,3、*, Bayanheshig1, Li Wenhao1, and Kong Peng1,3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    Article index updated: Mar. 10, 2025

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    Han Jian, Bayanheshig, Li Wenhao, Kong Peng. Wavefront Aberration Analysis of the Interference Image According to Different Axis Alignment Errors in the Grating Exposure System[J]. Acta Optica Sinica, 2012, 32(7): 705002

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    Paper Information

    Category: Diffraction and Gratings

    Received: Jan. 9, 2012

    Accepted: --

    Published Online: May. 24, 2012

    The Author Email: Jian Han (hanjian523@163.com)

    DOI:10.3788/aos201232.0705002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology