Chinese Journal of Lasers, Volume. 25, Issue 3, 253(1998)
The Research of Optically Excited and Interrogated Silicon Resonators
[1] [1] K. E. B. Thornton, D. Uttamchandani, B. Culshaw. Novel optically excited resonant pressure sensor. Electron. Lett., 1988, 24(10): 573~574
[2] [2] J. D. Zook, D. W. Burns, J. N. Schoess et al.. Optically resonant micro-beams, Editors: M. Edward Motamedi, Rockwell International Science Ctr., Thousand Oaks, CA, USA; Leo Beiser, Leo Beiser Inc., Flushing, N Y, USA., Micro-Optics/Micromechanics and Laser Scanning and Shaping, Bellingham, Washington, 98227-0010, USA., published by SPIE-The International Society for Optical Engineering, 1995, 6~16
[3] [3] J. D. Zook, D. W. Burns, W. R. Herb et al.. Optically excited self-resonant microbeams. Sensors and Actuators, 1996, A52: 92~98
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[in Chinese], [in Chinese], [in Chinese]. The Research of Optically Excited and Interrogated Silicon Resonators[J]. Chinese Journal of Lasers, 1998, 25(3): 253