International Journal of Extreme Manufacturing, Volume. 6, Issue 6, 62004(2024)

Nanofabrication of nanostructure lattices: from high-quality large patterns to precise hybrid units

Ma Rui, Zhang Xiaodan, Sutherland Duncan, Bochenkov Vladimir, and Deng Shikai
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Ma Rui, Zhang Xiaodan, Sutherland Duncan, Bochenkov Vladimir, Deng Shikai. Nanofabrication of nanostructure lattices: from high-quality large patterns to precise hybrid units[J]. International Journal of Extreme Manufacturing, 2024, 6(6): 62004

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Paper Information

Category: Topical Review

Received: Dec. 27, 2023

Accepted: Feb. 13, 2025

Published Online: Feb. 13, 2025

The Author Email:

DOI:10.1088/2631-7990/ad6838

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