Laser & Optoelectronics Progress, Volume. 60, Issue 3, 0312007(2023)
Research on the Key Technologies of Microchip Laser Common-Path Frequency-Modulation Feedback Interferometer
Fig. 1. Principle of laser feedback and laser output intensity diagram[2]. (a) Principle of laser feedback; (b) laser feedback fringe, curve of laser intensity induced by mirror displacement
Fig. 2. Principle diagram of optical feedback frequency modulation and phase heterodyne measurement method for micro-chip laser[6]
Fig. 4. Optical power spectrum and relaxation oscillation of the microchip laser[8]. (a) Single-longitudinal mode laser power spectrum, fRO; (b) dual-longitudinal mode laser power spectrum, fRO'; (c) optical power spectrum of single-longitudinal mode laser frequency shift feedback, modulated frequency f
Fig. 5. Relaxation oscillation frequency of Nd∶YVO4 laser and Nd∶GdVO4 laser as a function of relative pump level
Fig. 6. Relationship of relaxation oscillation frequency with relative pump level at different cavity lengths
Fig. 7. Variation of relaxation oscillation frequency with relative pump level under different reflectances of output mirror
Fig. 8. Frequency stabilization of the microchip laser (size is 30 mm×30 mm×40 mm)[9]
Fig. 9. System configuration of the quasi common path, frequency multiplexing laser self-mixing interferometer[8]
Fig. 10. Results of performance verification. (a) Zero drift characteristics of the system; (b) tested data of the system's displacement resolution
Fig. 11. Micro-chip laser feedback interferometer, quasi-common-path dual microchip frequency multiplexing technology
Fig. 12. Schematic diagram of two laser beams generated by two LD's directly pumping a piece of Nd∶YVO4 microchip laser
Fig. 14. Resolution of the quasi-common-path frequency-multiplexing microchip laser interferometer
Fig. 16. Total frequency shift f is less than the relaxation oscillation frequency (oscilloscope display)
Fig. 17. Total frequency shift f is greater than the relaxation oscillation frequency (oscilloscope display)
Fig. 20. Frequency domain and time domain signal of feedback light obtained by microchip feedback interferometer (target is sound box) [19]
Fig. 21. Waveform and spectrum of sound signal[19]. (a) Measured signal; (b) original signal
Fig. 22. Schematic diagram of two-dimensional displacement measurement by laser feedback of the micro-piece[20]
Fig. 23. Measurement results of two-dimensional displacement[20]. (a) In-plane displacement resolution; (b) out-of-plane displacement resolution; (c) two-dimensional displacement range; (d) Lissajous graph trajectory
Fig. 24. Measurement device of material thermal expansion based on Nd∶YAG laser feedback interferometer[21]
Fig. 25. Refractive index and thickness measured by quasi common laser feedback interferometry[22]
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Shulian Zhang, Yuan Yang. Research on the Key Technologies of Microchip Laser Common-Path Frequency-Modulation Feedback Interferometer[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312007
Category: Instrumentation, Measurement and Metrology
Received: Dec. 19, 2022
Accepted: Jan. 17, 2023
Published Online: Mar. 3, 2023
The Author Email: Shulian Zhang (zsl-dpi@tsinghua.edu.cn)