Laser & Optoelectronics Progress, Volume. 60, Issue 3, 0312007(2023)

Research on the Key Technologies of Microchip Laser Common-Path Frequency-Modulation Feedback Interferometer

Shulian Zhang* and Yuan Yang
Author Affiliations
  • State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China
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    Figures & Tables(26)
    Principle of laser feedback and laser output intensity diagram[2]. (a) Principle of laser feedback; (b) laser feedback fringe, curve of laser intensity induced by mirror displacement
    Principle diagram of optical feedback frequency modulation and phase heterodyne measurement method for micro-chip laser[6]
    Output transverse mode of Nd∶YVO4 laser[7]
    Optical power spectrum and relaxation oscillation of the microchip laser[8]. (a) Single-longitudinal mode laser power spectrum, fRO; (b) dual-longitudinal mode laser power spectrum, fRO'; (c) optical power spectrum of single-longitudinal mode laser frequency shift feedback, modulated frequency f
    Relaxation oscillation frequency of Nd∶YVO4 laser and Nd∶GdVO4 laser as a function of relative pump level
    Relationship of relaxation oscillation frequency with relative pump level at different cavity lengths
    Variation of relaxation oscillation frequency with relative pump level under different reflectances of output mirror
    Frequency stabilization of the microchip laser (size is 30 mm×30 mm×40 mm)[9]
    System configuration of the quasi common path, frequency multiplexing laser self-mixing interferometer[8]
    Results of performance verification. (a) Zero drift characteristics of the system; (b) tested data of the system's displacement resolution
    Micro-chip laser feedback interferometer, quasi-common-path dual microchip frequency multiplexing technology
    Schematic diagram of two laser beams generated by two LD's directly pumping a piece of Nd∶YVO4 microchip laser
    Laser transverse modes of the two beams
    Resolution of the quasi-common-path frequency-multiplexing microchip laser interferometer
    Zero drift measurement at the working distance of 10 m
    Total frequency shift f is less than the relaxation oscillation frequency (oscilloscope display)
    Total frequency shift f is greater than the relaxation oscillation frequency (oscilloscope display)
    Optical path structure of Nd∶YVO4 laser feedback confocal system
    One-dimensional, two-dimensional, and three-dimensional tomography
    Frequency domain and time domain signal of feedback light obtained by microchip feedback interferometer (target is sound box) [19]
    Waveform and spectrum of sound signal[19]. (a) Measured signal; (b) original signal
    Schematic diagram of two-dimensional displacement measurement by laser feedback of the micro-piece[20]
    Measurement results of two-dimensional displacement[20]. (a) In-plane displacement resolution; (b) out-of-plane displacement resolution; (c) two-dimensional displacement range; (d) Lissajous graph trajectory
    Measurement device of material thermal expansion based on Nd∶YAG laser feedback interferometer[21]
    Refractive index and thickness measured by quasi common laser feedback interferometry[22]
    • Table 1. Measurements of refractive index and thickness of fused quartz, calcium fluoride, and zinc selenide samples

      View table

      Table 1. Measurements of refractive index and thickness of fused quartz, calcium fluoride, and zinc selenide samples

      No.Fused silicaCaF2ZnSe
      Refractive indexThickness /mmRefractive indexThickness /mmRefractive indexThickness /mm
      11.4496819.97461.4284519.82732.482789.8944
      21.4497219.97501.4284819.82762.482789.8950
      31.4496919.97601.4284819.82812.482789.8952
      41.4497319.97481.4284519.82872.482789.8949
      51.4496919.97521.4284619.82822.482789.8952
      61.4497219.97441.4284819.82832.482789.8952
      71.4497119.97521.4284619.82822.482789.8952
      81.4497219.97531.4284919.82842.482789.8951
      91.4497019.97571.4284619.82832.482789.8950
      101.4497319.97521.4284419.82822.482789.8949
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    Shulian Zhang, Yuan Yang. Research on the Key Technologies of Microchip Laser Common-Path Frequency-Modulation Feedback Interferometer[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312007

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 19, 2022

    Accepted: Jan. 17, 2023

    Published Online: Mar. 3, 2023

    The Author Email: Shulian Zhang (zsl-dpi@tsinghua.edu.cn)

    DOI:10.3788/LOP223349

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