Journal of Infrared and Millimeter Waves, Volume. 39, Issue 3, 279(2020)

CMOS compatible multichannel mid-infrared photonic crystal sensor

Yi ZHOU, Lei WANG, Jun LI, Xue-Lei YANG, Feng-Yuan GAN, Ying-Xuan ZHAO, Chao QIU, and Wei LI
Author Affiliations
  • Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai200050, China
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    Figures & Tables(8)
    Schematic structure of the designed multiport in-plane sensor
    Band diagram for the PhC slab.
    The energy distribution of (a) the normal bend and (b) the optimized bend.
    The energy distribution of (a) the original cavity and (b) the benzene perturbed cavity.
    The transmission spectrum of the bus waveguide (black line), the bend waveguide (red line) and four channels of the sensor
    (a) The shifts in the resonant wavelength of the sensor in pure CCl4 solutions, pure benzene solutions and mixture of these solutions with different concentrations, (b) The linear fits of four channels of the sensor (with center wavelength λ = 3.29, 3.30, 3.31 and 3.32μm in air) between changes of resonant wavelength and changes of concentration
    • Table 1. Resonant wavelengths and quality factor versus Si

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      Table 1. Resonant wavelengths and quality factor versus Si

      Si(nm)Wavelength(nm)Quality Factor
      493290.61390.87
      553300.021335.04
      613311.411245.75
      6733201189.5
    • Table 2. Resonant wavelengths and sensitivity function versus R

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      Table 2. Resonant wavelengths and sensitivity function versus R

      R(nm)λ(nm)QF(nm/RIU)
      3743343.141 404.81203.7
      3793323.791 204.23209.9
      3843300.021 335.04209.2
      3893280.281 220.02209.9
      3943257.91 059.84209.9
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    Yi ZHOU, Lei WANG, Jun LI, Xue-Lei YANG, Feng-Yuan GAN, Ying-Xuan ZHAO, Chao QIU, Wei LI. CMOS compatible multichannel mid-infrared photonic crystal sensor[J]. Journal of Infrared and Millimeter Waves, 2020, 39(3): 279

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    Paper Information

    Category: Materials and Devices

    Received: Nov. 12, 2019

    Accepted: --

    Published Online: Jul. 7, 2020

    The Author Email:

    DOI:10.11972/j.issn.1001-9014.2020.03.002

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