[1] [1] Wang Qiang, Zhang Zhuqing, Shen Mingrong, et al.. Study on selective emitter solar cell fabrication process with Si3N4 mask layer[J]. Semiconductor Optoelectronics, 2013, 34(2): 259-263.

[2] [2] Zhou Zhen, Shi Linxing. Optimized design of plasmonic thin film solar cells with metal nanogratings[J]. Laser & Optoelectronics Progress, 2012, 49(11): 112303.

[3] [3] Zhou Tao, Lu Xiaodong, Zhang Ming, et al.. Crystalline silicon solar-cell development status and trends[J]. Laser & Optoelectronics Progress, 2013, 50(3): 030002.

[4] [4] Da Ming Chen, Zong Cun Liang, Lin Zhuang, et al.. A novel method to achieve selective emitter for silicon solar cell using low cost pattern-able a-Si thin films as the semi-transparent phosphorus diffusion barrier[J]. Applied Energy, 2012, 92: 315-321.

[5] [5] Wu Yuzhi. Research on Selective Diffusion and Surface Passivation for Crystalline Silicon Solarcell[D]. Kunming: Yunnan Normal University, 2002.

[6] [6] Sophie Ledru, Nadine Ruille. One-step screen-printed electrode modified in its bulk with HRP based on direct electron transfer for hydrogen peroxide detection in flow injection mode[J]. Biosensors and Bioelectronics, 2006, 21(8): 1591-1598.

[7] [7] Hai Bo. Studies on Selective Emitting Mono-Crystalline Silicon Solar Cells by Etching[D]. Beijing: Beijing Jiaotong University, 2011.

[8] [8] Yang Shaopeng, Zhao Yanxin, Han Lingjie, et al.. High-efficiency polymer solar cells without optical spacer[J]. Acta Optica Sinica, 2012, 32(5): 0531001.

[9] [9] Cao Jing, Zhan Zhen, Liu Pengyi. Optical simulation based on P3HT: PCBN bulk-heterojunction solar cells: a comparison of normal and inverted structures of device[J]. Acta Optica Sinica, 2013, 33(3): 0323004.

[10] [10] Zhou Jian, Li Hongfei, Liu Yucheng, et al.. Design and fabrication of an irregularlyshaped distributed Bragg reflector for hetero-junction with intrinsic thin layer solar cells[J]. Acta Optica Sinica, 2013, 33(9): 0931003.

[11] [11] Stephen A Campbell. The Science and Engineering of Microelectronic Fabrication (Sencond Edition) [M]. Zeng Ying, Yan Liren, Wang Jimin, Trans.. Beijing: Publishing House of Electronics Industry, 2003. 418-422.

[12] [12] Qu Sheng, Chen Tingjin. Study on the selective emitter structure of solar cells[J]. Journal of Yunnan Normal University (Natural Science Edition), 2005, 25(3): 21-24.

[13] [13] Liu Enke, Zhu Bingsheng, Luo Jinsheng, et al.. Semiconductor Physics[M]. Beijing: National Defence Industry Press, 1994. 120-194.

[14] [14] ASTM F1529-97. Standard test method for sheet resistance uniformity evaluation by in-line-point probe with the dual-configuration procedure[S]. Annual Book of ASTM Standards, 1999.

[15] [15] Shi Min, Zhao Heming. Physics and Process of Semiconductor Device[M]. Suzhou: Suzhou University Press, 2004.

[16] [16] Wu Yuzhi, Peng Yinsheng. Research on selective diffusion of crystalline silicon solar cell[J]. Acta Energjae Solaris Sinica, 2005, 26(5): 635-638.