Fig. 1. Schematic of multi-system collaborative micro-hole drilling platform

Fig. 2. Effect of focal position on hole shape during stepwise adjustment of drilling parameters

Fig. 3. Machining results based on drilling parameter two-stage adjustment process of "first lower penetrating hole and then upper expanding hole"

Fig. 4. Effects of change range and rate of drilling parameters on hole shape （L is -6‒6 mm）

Fig. 5. Simulation of multi-beam helical drilling. (a) Optical path simulation model; (b) spot paths and rotation radii of sub-beams near focal plane; (c) influence of angle of beam incident of Dove prism on focused sub-beam angle during helical drilling process; (d)‒(f) focused sub-beam angle changes during helical drilling process under different beam splitting modes

Fig. 6. Parallel processing process of 9 beams (3×3) captured by coaxial imaging system

Fig. 7. Uniformity of micro-holes drilled by multi-beam helical parallel processing system

Fig. 8. Coaxial images and SEM images of multi-beam helical drilling process under different beam-splitting modes. (a)(b) 1×9;

Fig. 9. Multi-beam processing of shaped micro-holes based on dynamic regulation of optical rotation parameters. (a) Coaxial images at different moments and final micro-hole cross-section during 16-beam (4×4) helical parallel processing ; (b) schematic of dynamic change of beam-rotation angle; (c) cross section of shaped micro-holes drilled by multi-beam helical processing system