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Chinese Optics Letters, Volume. 13, Issue 12, 122301(2015)

Linear variable filters fabricated by ion beam etching with triangle-shaped mask and normal film coating technique

Bin Sheng, Peng Chen*, Chunxian Tao, Ruijin Hong, Yuanshen Huang, and Dawei Zhang
Author Affiliations
  • Engineering Research Center of Optical Instruments and Systems, Ministry of Education and Shanghai Key Laboratory of Modern Optical Systems, University of Shanghai for Science and Technology, Shanghai 200093, China
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    Figures&Tables (8)
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    Figures & Tables(8)
    Measured refractive indexes of Ta2O5 and SiO2.

    Fig. 1. Measured refractive indexes of Ta2O5 and SiO2.

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    Transmission spectra with different thicknesses of the resonant cavity.

    Fig. 2. Transmission spectra with different thicknesses of the resonant cavity.

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    Fabrication process flow of the designed LVOF.

    Fig. 3. Fabrication process flow of the designed LVOF.

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    Schematic diagram of ion beam etching.

    Fig. 4. Schematic diagram of ion beam etching.

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    Schematic diagram of sample and mask.

    Fig. 5. Schematic diagram of sample and mask.

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    Schematic diagram of sample and split.

    Fig. 6. Schematic diagram of sample and split.

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    Measured transmission spectra at different positions.

    Fig. 7. Measured transmission spectra at different positions.

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    Relationship between position and peak wavelength.

    Fig. 8. Relationship between position and peak wavelength.

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    Bin Sheng, Peng Chen, Chunxian Tao, Ruijin Hong, Yuanshen Huang, Dawei Zhang, "Linear variable filters fabricated by ion beam etching with triangle-shaped mask and normal film coating technique," Chin. Opt. Lett. 13, 122301 (2015)

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    Paper Information

    Category: Optical devices

    Received: Jun. 14, 2015

    Accepted: Oct. 16, 2015

    Published Online: Sep. 12, 2018

    The Author Email: Peng Chen (qjzxchp123@126.com)

    DOI:10.3788/COL201513.122301

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology