Laser & Optoelectronics Progress, Volume. 51, Issue 5, 51203(2014)

High Precise Absolute Flat Calibration

Miao Erlong*, Su Dongqi, and Peng Shijun
Author Affiliations
  • [in Chinese]
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    References(16)

    [1] [1] Jan Burke, David S Wu. Calibration of spherical reference surfaces for Fizeau interferometry: a comparative study of methods [J]. Appl Opt, 2010, 49(31): 6014-6023.

    [2] [2] Weibo Wang, Jiubin Tan, Tong Wang, et al.. Reference surface calibration of a Fizeau interferometer through even/odd synthesis [J]. Appl Opt, 2011, 50(20): 3482-3487.

    [3] [3] Ikumatsu Fujimoto, Toshiyuki Takatsuji, Kunitoshi Nishimura, et al.. Autonomous calibration method of the reference flat surface of an interferometer without using a standard flat surface [J]. Appl Opt, 2012, 51(20): 4754-4767.

    [4] [4] G Sehulz, J Schwider, C Hiller. Establishing an optical flatness standard [J]. Appl Opt, 1971, 10(4): 929-934.

    [5] [5] G Schulz, J Schwider. Precise measurement of planeness [J]. Appl Opt, 1967, 6(6): 1077-1084.

    [6] [6] P B Keenan. Pseudo-shear interferometry [C]. SPIE, 1984, 123(4): 2-9.

    [7] [7] Klaus R Freischlad. Absolute interferometric testing based on reconstruction of rotational shear [J].Appl Opt, 2001, 40(10): 1637-1648.

    [8] [8] E E Bloemhof. Absolute surface metrology by differencing spatially shifted maps from a phase-shifting interferometer [J]. Opt Lett, 2010, 35(14): 2346-2348.

    [9] [9] L Rayleigh. Interference bands and their applications [J]. Nature, 1893, 48(1235): 212-214.

    [10] [10] G Schulz, J Schwider. Precise measurement of planeness [J]. Appl Opt, 1967, 6(6): 1077-1084.

    [11] [11] Ian Powell, Emmanuelle Goulet. Absolute figure measurements with a liquid-flat reference [J]. Appl Opt, 1998, 37(13): 2579-2588.

    [13] [13] Maurizio Vannoni, Giuseppe Molesini. Validation of absolute planarity reference plates with a liquid mirror [J]. Metrologia, 2005, 42(5): 389-393.

    [14] [14] Dongqi Su, Erlong Miao, Yongxin Sui, et al.. Absolute surface figure testing by shift- rotation method using Zernike polynomials [J]. Opt Lett, 2012, 37(15): 3198-3200.

    [15] [15] Song Weihong, Wu Fan, Hou Xi. Study on the absolute testing of rotationally asymmetric surface deviation with the method of single rotation [J]. Acta Optica Sinica, 2012,32(8): 0812006.

    CLP Journals

    [1] Zhu Penghui, Tang Feng, Lu Yunjun, Wang Xiangzhao, Guo Fudong, Li Yong. Research on High Accuracy Sub-Aperture Stitching Algorithm for Flat Optics[J]. Chinese Journal of Lasers, 2016, 43(11): 1104002

    [2] Gao Bo, Li Qiang, Liu Ang, He Yuhang, Chai Liqun. Two-Flat Test Solution Based on Iterative Algorithm[J]. Acta Optica Sinica, 2014, 34(12): 1212003

    [3] Li Yong, Tang Feng, Lu Yunjun, Wang Xiangzhao, Guo Fudong, Li Jie, Wu Feibin. A Method for Reducing the Error Accumulation in Sub-Aperture Stitching Interferometer for Flat Optics[J]. Chinese Journal of Lasers, 2015, 42(7): 708006

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    Miao Erlong, Su Dongqi, Peng Shijun. High Precise Absolute Flat Calibration[J]. Laser & Optoelectronics Progress, 2014, 51(5): 51203

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 19, 2013

    Accepted: --

    Published Online: May. 6, 2014

    The Author Email: Miao Erlong (ustcmiao@qq.com)

    DOI:10.3788/lop51.051203

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