Acta Optica Sinica, Volume. 30, Issue 5, 1451(2010)
Fabrication of High Aspect Ratio Sub-micron Gratings on PMMA Plate Based on Synchrony Radiation Lithography
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Li Yigui, Sugiyama Susumu. Fabrication of High Aspect Ratio Sub-micron Gratings on PMMA Plate Based on Synchrony Radiation Lithography[J]. Acta Optica Sinica, 2010, 30(5): 1451
Paper Information
Category: Optical Design and Fabrication
Received: Aug. 2, 2009
Accepted: --
Published Online: May. 11, 2010
The Author Email: Yigui Li (ygli@sjtu.edu.cn)
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