Chinese Optics Letters, Volume. 9, Issue 6, 063001(2011)

Spectroscopic characterization of fluorine atoms in atmospheric pressure He/SF6 plasmas

Huiliang Jin, Bo Wang, and Feihu Zhang
Author Affiliations
  • Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China
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    References(10)

    [1] [1] Y. Mori, K. Yamamura, K. Endo, K. Yamauchi, K. Yasutake, H. Goto, H. Kakiuchi, Y. Sano, and H. Mimura, J. Cryst. Growth 275, 39 (2005).

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    CLP Journals

    [1] Xing Su, Longguang Xia, Kan Liu, Peng Zhang, Ping Li, Runchang Zhao, Bo Wang, "Fabrication of a large-aperture continuous phase plate in two modes using atmospheric pressure plasma processing," Chin. Opt. Lett. 16, 102201 (2018)

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    Huiliang Jin, Bo Wang, Feihu Zhang, "Spectroscopic characterization of fluorine atoms in atmospheric pressure He/SF6 plasmas," Chin. Opt. Lett. 9, 063001 (2011)

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    Paper Information

    Category: Spectroscopy

    Received: Nov. 22, 2010

    Accepted: Jan. 28, 2011

    Published Online: May. 6, 2011

    The Author Email:

    DOI:10.3788/COL201109.063001

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