[1] Robertson J. Diamond-like amorphous carbon[J]. Materials Science and Engineering:R:Reports, 37, 129-281(2002).

[2] Yang Zhilin, He Zhibing, Song Zhimin, . Influence of T₂B/H₂ flow ratio on thermal stability of glow discharge polymer prepared by low-pressure plasma chemical vapor deposition[J]. High Power Laser and Particle Beams, 22, 1044-1048(2010).

[3] Li Rui, He Zhibing, He Xiaoshan, . Influence of radio-frequency power on the state of H₂/C₄H₈ glowing discharge plasma[J]. Acta Physica Sinica, 61, 215203(2012).

[4] Li Rui, He Zhibing, Yang Xiangdong, . Influence of working pressure on the state of H₂/C₄H₈ glowing discharge plasma[J]. Acta Physica Sinica, 62, 058104(2013).

[5] Frolov V D, Zavedeev E V, Pimenov S M, et al. Nanocones on (a-C: H): Si composite films: thermal stability, growth dynamics and electrical properties[J]. Diamond and Related Materials, 16, 1218-1221(2007).

[6] Li Longqiu, Xu Ming, Song Wenping, et al. The effect of empirical potential functions on modeling of amorphous carbon using molecular dynamics method[J]. Applied Surface Science, 286, 287-297(2013).

[7] Zhang Hongliang, Wu Weidong, He Zhibing, . Preparation and thermal stability of Fe-doped hydrogenated amorphous carbon films[J]. High Power Laser and Particle Beams, 20, 621-624(2008).

[8] Ernst K H, Oral B. On the chemistry at the Si, Ti-doped a-C: H/TiC interface[J]. Thin Solid Films, 446, 72-77(2004).

[9] Mangolini F, Hilbert J, McClimon J B, et al. Thermally induced structural evolution of silicon- and oxygen-containing hydrogenated amorphous carbon: a combined spectroscopic and molecular dynamics simulation investigation[J]. Langmuir, 34, 2989-2995(2018).

[10] Erdemir A, Donnet C. Tribology of diamond-like carbon films: recent progress and future prospects[J]. Journal of Physics D:Applied Physics, 39, R311-R327(2006).

[11] Ray S C, Bao C W, Tsai H M, et al. Electronic structure and bonding properties of Si-doped hydrogenated amorphous carbon films[J]. Applied Physics Letters, 85, 4022-4024(2004).

[12] Hoppe M L. Large glass shells from GDP shells[J]. Fusion Technology, 38, 42-45(2000).

[13] Zhang Ying, He Zhibing, Li Ping, . Thermal stability of Si-doped glow discharge polymer films[J]. Acta Physica Sinica, 60, 126501(2011).

[14] Zhang Ying, He Zhibing, Yan Jiancheng, . Influence of pressure on structure and properties of Si-doped glow discharge polymer film[J]. Acta Physica Sinica, 60, 066803(2011).

[15] Chouquet C, Gerbaud G, Bardet M, et al. Structural and mechanical properties of a-C: H and Si doped a-C: H thin films grown by LF-PECVD[J]. Surface and Coatings Technology, 204, 1339-1346(2010).

[16] He Zhibing, Yang Zhilin, Yan Jiancheng, . Structure and mechanical property of glow discharge polymer[J]. Acta physica Sinica, 60, 086803(2011).

[17] Bilek M M M, McKenzie D R, McCulloch D G, et al. Ab initio simulation of structure in amorphous hydrogenated carbon[J]. Physical Review B, 62, 3071-3077(2000).

[18] Hamel S, Benedict L X, Celliers P M, et al. Equation of state of CH_1.36: first-principles molecular dynamics simulations and shock-and-release wave speed measurements[J]. Physical Review B, 86, 094113(2012).

[19] De Tomas C, Suarez-Martinez I, Marks N A. Graphitization of amorphous carbons: a comparative study of interatomic potentials[J]. Carbon, 109, 681-693(2016).

[20] Hilbert J, Mangolini F, McClimon J B, et al. Si doping enhances the thermal stability of diamond-like carbon through reductions in carbon-carbon bond length disorder[J]. Carbon, 131, 72-78(2018).

[21] Chenoweth K, van Duin A C T, Goddard W A. ReaxFF reactive force field for molecular dynamics simulations of hydrocarbon oxidation[J]. The Journal of Physical Chemistry A, 112, 1040-1053(2008).

[22] van Duin A C T, Dasgupta S, Lorant F, et al. ReaxFF: a reactive force field for hydrocarbons[J]. The Journal of Physical Chemistry A, 105, 9396-9409(2001).

[23] Senftle T P, Hong S, Islam M M, et al. The ReaxFF reactive force-field: development, applications and future directions[J]. npj Computational Materials, 2, 15011(2016).

[24] Liu Qingkang, Ssong Wenping, Huang Qitao, et al. ReaxFF reactive molecular dynamics simulation of the oxidation of silicon-doped amorphous carbon film in heat-assisted magnetic recording[J]. Acta Physico-Chimica Sinica, 33, 2472-2479(2017).

[25] Tang Yujie, Zheng Mo, Ren Chunxing, . Visualized reaction tracking and physical property analysis for a picked 3D area in a reactive molecular dynamics simulation system[J]. Acta Physico-Chimica Sinica, 37, 2003037(2021).

[26] Thompson A P, Aktulga H M, Berger R, et al. LAMMPS - a flexible simulation tool for particle-based materials modeling at the atomic, meso, and continuum scales[J]. Computer Physics Communications, 271, 108171(2022).

[27] Aktulga H M, Fogarty J C, Pandit S A, et al. Parallel reactive molecular dynamics: numerical methods and algorithmic techniques[J]. Parallel Computing, 38, 245-259(2012).

[28] Newsome D A, Sengupta D, Foroutan H, et al. Oxidation of silicon carbide by O₂ and H₂O: a ReaxFF reactive molecular dynamics study, part I[J]. The Journal of Physical Chemistry C, 116, 16111-16121(2012).

[29] Gao Wei, Zhu Jiaqi, Niu Li, . et al. Ab initio structural simulation and electronic structure of amorphous carbon[J]. Acta Physica Sinica, 57, 398-404(2008).

[30] Martínez L, Andrade R, Birgin E G, et al. PACKMOL: a package for building initial configurations for molecular dynamics simulations[J]. Journal of Computational Chemistry, 30, 2157-2164(2009).

[31] Suter U W, Eichinger B E. Estimating elastic constants by averaging over simulated structures[J]. Polymer, 43, 575-582(2002).

[32] Ai Xing, Chen Guo, Zhang Ling, et al. The radial distribution of ions and electrons in RF inductively coupled H₂/T₂B plasmas[J]. Plasma Chemistry and Plasma Processing, 38, 281-292(2018).